| Presentation | 2018-03-01 A Study of Lithography Hotspot Detection Method Based on Feature Vectors Considering Distances between Wires Gaku Kataoka, Masato Inagi, Shinobu Nagayama, Shin'ichi Wakabayashi, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | In lithography, which is one of the LSI fabrication processes, a layout pattern with a high failure probability is called a hotspot. In machine-learning based hotspot detection methods, Density Based Layout Feature, which considers only the area of wires in each local region, is widely used. Meanwhile, as we can see from the fact that the distance between wires is checked in design rule checking, when it is smaller, the transferred patterns of wires tend to form short circuits with a higher probability. Thus, the distance between wires is possibly an important measure for hotspot detection. Therefore, in this study, we propose and evaluate a hotspot detection method that considers the distance between wires as a feature vector. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | lithography / hotspot / machine learning / detection accuracy |
| Paper # | VLD2017-105 |
| Date of Issue | 2018-02-21 (VLD) |
| Conference Information | |
| Committee | VLD / HWS |
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| Conference Date | 2018/2/28(3days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Okinawa Seinen Kaikan |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | Hiroyuki Ochi(Ritsumeikan Univ.) |
| Vice Chair | Noriyuki Minegishi(Mitsubishi Electric) |
| Secretary | Noriyuki Minegishi(Hiroshima City Univ.) / (NTT) |
| Assistant | |
| Paper Information | |
| Registration To | Technical Committee on VLSI Design Technologies / Technical Committee on Hardware Security |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | A Study of Lithography Hotspot Detection Method Based on Feature Vectors Considering Distances between Wires |
| Sub Title (in English) | |
| Keyword(1) | lithography |
| Keyword(2) | hotspot |
| Keyword(3) | machine learning |
| Keyword(4) | detection accuracy |
| 1st Author's Name | Gaku Kataoka |
| 1st Author's Affiliation | Hiroshima City University(Hiroshima City Univ.) |
| 2nd Author's Name | Masato Inagi |
| 2nd Author's Affiliation | Hiroshima City University(Hiroshima City Univ.) |
| 3rd Author's Name | Shinobu Nagayama |
| 3rd Author's Affiliation | Hiroshima City University(Hiroshima City Univ.) |
| 4th Author's Name | Shin'ichi Wakabayashi |
| 4th Author's Affiliation | Hiroshima City University(Hiroshima City Univ.) |
| Date | 2018-03-01 |
| Paper # | VLD2017-105 |
| Volume (vol) | vol.117 |
| Number (no) | VLD-455 |
| Page | pp.pp.97-102(VLD), |
| #Pages | 6 |
| Date of Issue | 2018-02-21 (VLD) |