| Presentation | 2018-03-08 Room temperature atomic layer depsoition and its application Fumihiko Hirose, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | |
| Paper # | EMD2017-71,MR2017-42,SCE2017-42,EID2017-44,ED2017-116,CPM2017-136,SDM2017-116,ICD2017-121,OME2017-65 |
| Date of Issue | 2018-03-01 (EMD, MR, SCE, EID, ED, CPM, SDM, ICD, OME) |
| Conference Information | |
| Committee | CPM / ED / EID / SDM / ICD / MR / SCE / OME / EMD |
|---|---|
| Conference Date | 2018/3/8(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | Fumihiko Hirose(Yamagata Univ.) / Kunio Tsuda(Toshiba) / Yuko Kominami(Shizuoka Univ.) / Tatsuya Kunikiyo(Renesas) / Hideto Hidaka(Renesas) / Yoshihiro Okamoto(Ehime Univ.) / Hiroaki Myoren(Saitama Univ.) / Tatsuo Mori(Aichi Inst. of Tech.) / Yoshiteru Abe(NTT) |
| Vice Chair | Mayumi Takeyama(Kitami Inst. of Tech.) / Michihiko Suhara(TMU) / Mutsumi Kimura(Ryukoku Univ.) / Takahiro Shinada(Tohoku Univ.) / Makoto Nagata(Kobe Univ.) / / / Yutaka Majima(Tokyo Inst. of Tech.) |
| Secretary | Mayumi Takeyama(Nihon Univ.) / Michihiko Suhara(Toyohashi Univ. of Tech.) / Mutsumi Kimura(New JRC) / Takahiro Shinada(NICT) / Makoto Nagata(NTT) / (Tokyo Inst. of Tech.) / (Tohoku Univ.) / Yutaka Majima(Renesas) / (Univ. of Tokyo) |
| Assistant | Yuichi Akage(NTT) / Toshiyuki Oishi(Saga Univ.) / Tatsuya Iwata(TUT) / Rumiko Yamaguchi(Akita Univ.) / Hiroyuki Nitta(Japan Display) / Mitsuru Nakata(NHK) / Ryosuke Nonaka(Toshiba) / Takeshi Okuno(Huawei) / Tomokazu Shiga(Univ. of Electro-Comm.) / Hiroya Ikeda(Shizuoka Univ.) / Tetsu Morooka(TOSHIBA MEMORY) / Masanori Natsui(Tohoku Univ.) / Masatoshi Tsuge(Socionext) / Hiroyuki Ito(Tokyo Inst. of Tech.) / Pham Konkuha(Univ. of Electro-Comm.) / Tazumi Nagasawa(Toshiba) / Shuhei Yoshida(Kinki Univ.) / Hiroyuki Akaike(Daido Univ.) / Hirotake Kajii(Osaka Univ.) / Toshihiko Kaji(Tokyo Univ. of Agriculture and Tech.) / Yoshiki Kayano(Univ. of Electro-Comm.) |
| Paper Information | |
| Registration To | Technical Committee on Component Parts and Materials / Technical Committee on Electron Devices / Technical Committee on Electronic Information Displays / Technical Committee on Silicon Device and Materials / Technical Committee on Integrated Circuits and Devices / Technical Committee on Magnetic Recording / Technical Committee on Superconductive Electronics / Technical Committee on Organic Molecular Electronics / Technical Committee on Electromechanical Devices |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Room temperature atomic layer depsoition and its application |
| Sub Title (in English) | |
| Keyword(1) | |
| 1st Author's Name | Fumihiko Hirose |
| 1st Author's Affiliation | Yamagata University(Yamagata Univ.) |
| Date | 2018-03-08 |
| Paper # | EMD2017-71,MR2017-42,SCE2017-42,EID2017-44,ED2017-116,CPM2017-136,SDM2017-116,ICD2017-121,OME2017-65 |
| Volume (vol) | vol.117 |
| Number (no) | EMD-492,MR-493,SCE-494,EID-495,ED-496,CPM-497,SDM-498,ICD-499,OME-500 |
| Page | pp.pp.1-4(EMD), pp.1-4(MR), pp.1-4(SCE), pp.1-4(EID), pp.1-4(ED), pp.1-4(CPM), pp.1-4(SDM), pp.1-4(ICD), pp.1-4(OME), |
| #Pages | 4 |
| Date of Issue | 2018-03-01 (EMD, MR, SCE, EID, ED, CPM, SDM, ICD, OME) |