| Presentation | 2018-03-01 Low-temperature thin film growth and atomic layer deposition Fumihiko Hirose, |
|---|---|
| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | |
| Paper # | CPM2017-121 |
| Date of Issue | 2018-02-22 (CPM) |
| Conference Information | |
| Committee | CPM |
|---|---|
| Conference Date | 2018/3/1(2days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Tokyo Univ. of Technol. |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | CPM young researcher's meeting |
| Chair | Fumihiko Hirose(Yamagata Univ.) |
| Vice Chair | Mayumi Takeyama(Kitami Inst. of Tech.) |
| Secretary | Mayumi Takeyama(.) |
| Assistant | Yuichi Akage(NTT) |
| Paper Information | |
| Registration To | Technical Committee on Component Parts and Materials |
|---|---|
| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Low-temperature thin film growth and atomic layer deposition |
| Sub Title (in English) | |
| Keyword(1) | |
| Keyword(2) | |
| 1st Author's Name | Fumihiko Hirose |
| 1st Author's Affiliation | Yamagata Univ(Yamagata Univ) |
| Date | 2018-03-01 |
| Paper # | CPM2017-121 |
| Volume (vol) | vol.117 |
| Number (no) | CPM-461 |
| Page | pp.pp.23-26(CPM), |
| #Pages | 4 |
| Date of Issue | 2018-02-22 (CPM) |