Presentation | 2018-02-28 Construction of Seebeck coefficient evaluation technique by Kelvin-probe force microscopy Yuhei Suzuki, Akito Oka, Taketo Kawai, Hirokazu Tatsuoka, Hiroshi Inokawa, Masaru Shimomura, Kenji Murakami, Faiz Salleh, Hiroya Ikeda, |
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PDF Download Page | PDF download Page Link |
Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | Although the introduction of nanostructures into thermoelectric materials is one of key technology for enhancement in thermoelectric conversion efficiency, a technique for characterizing the nanometer-scale material is required. With the aim of evaluating Seebeck coefficient of nanostructured thermoelectric materials, we propose a new technique by Kelvin-probe force microscopy (KFM) which gives us local surface potential corresponding to the Fermi energy difference of a sample relative to the cantilever. Hence, thermoelectromotive force and temperature difference are obtained from the surface potentials and temperatures at the high- and low-temperature regions on the sample, which leads to evaluation of Seebeck coefficient. In this study, the Seebeck coefficient of Si-on-insulator (SOI) layer is evaluated by KFM. In addition, the measurement technique of local temperature by KFM is also described. |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | thermoelectrics / nanostructure / Seebeck coefficient / Kelvin-probe force microscopy (KFM) |
Paper # | ED2017-110,SDM2017-110 |
Date of Issue | 2018-02-21 (ED, SDM) |
Conference Information | |
Committee | ED / SDM |
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Conference Date | 2018/2/28(1days) |
Place (in Japanese) | (See Japanese page) |
Place (in English) | Centennial Hall, Hokkaido Univ. |
Topics (in Japanese) | (See Japanese page) |
Topics (in English) | Functional nanodevices and related technologies |
Chair | Kunio Tsuda(Toshiba) / Tatsuya Kunikiyo(Renesas) |
Vice Chair | Michihiko Suhara(TMU) / Takahiro Shinada(Tohoku Univ.) |
Secretary | Michihiko Suhara(New JRC) / Takahiro Shinada(NICT) |
Assistant | Toshiyuki Oishi(Saga Univ.) / Tatsuya Iwata(TUT) / Hiroya Ikeda(Shizuoka Univ.) / Tetsu Morooka(TOSHIBA MEMORY) |
Paper Information | |
Registration To | Technical Committee on Electron Devices / Technical Committee on Silicon Device and Materials |
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Language | JPN |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | Construction of Seebeck coefficient evaluation technique by Kelvin-probe force microscopy |
Sub Title (in English) | |
Keyword(1) | thermoelectrics |
Keyword(2) | nanostructure |
Keyword(3) | Seebeck coefficient |
Keyword(4) | Kelvin-probe force microscopy (KFM) |
1st Author's Name | Yuhei Suzuki |
1st Author's Affiliation | Shizuoka University(Shizuoka Univ.) |
2nd Author's Name | Akito Oka |
2nd Author's Affiliation | Shizuoka University(Shizuoka Univ.) |
3rd Author's Name | Taketo Kawai |
3rd Author's Affiliation | Shizuoka University(Shizuoka Univ.) |
4th Author's Name | Hirokazu Tatsuoka |
4th Author's Affiliation | Shizuoka University(Shizuoka Univ.) |
5th Author's Name | Hiroshi Inokawa |
5th Author's Affiliation | Shizuoka University(Shizuoka Univ.) |
6th Author's Name | Masaru Shimomura |
6th Author's Affiliation | Shizuoka University(Shizuoka Univ.) |
7th Author's Name | Kenji Murakami |
7th Author's Affiliation | Shizuoka University(Shizuoka Univ.) |
8th Author's Name | Faiz Salleh |
8th Author's Affiliation | University of Malaya(Univ. of Malaya) |
9th Author's Name | Hiroya Ikeda |
9th Author's Affiliation | Shizuoka University(Shizuoka Univ.) |
Date | 2018-02-28 |
Paper # | ED2017-110,SDM2017-110 |
Volume (vol) | vol.117 |
Number (no) | ED-453,SDM-454 |
Page | pp.pp.27-30(ED), pp.27-30(SDM), |
#Pages | 4 |
Date of Issue | 2018-02-21 (ED, SDM) |