Presentation 2018-02-23
[Special Invited Talk] Epitaxial Growth of Ge on Si and Photodetector Applications
Yasuhiko Ishikawa,
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Abstract(in Japanese) (See Japanese page)
Abstract(in English) Epitaxial growth of Ge layers on Si and applications to photodetectors (PDs) in the optical communication wavelength range (1.3?1.6 ?m) are described. In spite of the critical layer thickness of Ge on Si as small as a few nm due to the large lattice mismatch of 4%, high-quality epitaxial layers of Ge with an atomically flat surface are directly grown on Si, using a low-temperature buffer layer technique and a post-growth annealing process. Characteristics for PDs of Ge layers on Si are presented. Strain-engineered PDs for the detection wavelength control and applications to electro-absorption optical modulators as well as light emitters are also introduced.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) Silicon Photonics / Germanium / Epitaxial Growth / Photodetectors
Paper # LQE2017-152
Date of Issue 2018-02-16 (LQE)

Conference Information
Committee LQE
Conference Date 2018/2/23(1days)
Place (in Japanese) (See Japanese page)
Place (in English)
Topics (in Japanese) (See Japanese page)
Topics (in English)
Chair Tsuyoshi Yamamoto(Fujitsu Labs.)
Vice Chair Kiichi Hamamoto(Kyusyu Univ.)
Secretary Kiichi Hamamoto(Tohoku Univ.)
Assistant Yasumasa Kawakita(Furukawa Electric Industries) / Naoki Fujiwara(NTT)

Paper Information
Registration To Technical Committee on Lasers and Quantum Electronics
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) [Special Invited Talk] Epitaxial Growth of Ge on Si and Photodetector Applications
Sub Title (in English)
Keyword(1) Silicon Photonics
Keyword(2) Germanium
Keyword(3) Epitaxial Growth
Keyword(4) Photodetectors
1st Author's Name Yasuhiko Ishikawa
1st Author's Affiliation Toyohashi University of Technology(Toyohashi Univ. Tech.)
Date 2018-02-23
Paper # LQE2017-152
Volume (vol) vol.117
Number (no) LQE-448
Page pp.pp.7-10(LQE),
#Pages 4
Date of Issue 2018-02-16 (LQE)