Presentation 2017-12-15
Estimation by non-negative matrix factorization of dislocation regions in photoluminescence image of multicrystalline silicon
Hiroaki Kudo, Yusuke Hayama, Tetsuya Matsumoto, Kentaro Kutsukake, Noritaka Usami,
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Abstract(in Japanese) (See Japanese page)
Abstract(in English) In this report, we studied a specified method of regions including dislocations which are crystallographic defects in a photoluminescence (PL) image of multicrystalline silicon wafers. We utilized a method of non-negative matrix factorization (NMF) to reconstruct the wafer image. We assumed regions of dislocations caused large represent errors and presented darker colors. We obtained effective results by the proposed method than results of sparse coding methods using bases based on independent component analysis or NMF. Sparse coding methods allow negative values as coefficients matrix. As sample images of the learning process, images without dislocations lead effective results.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) multicrystalline silicon / photoluminescence image / dislocation / non-negative matrix factorization
Paper # IMQ2017-22
Date of Issue 2017-12-08 (IMQ)

Conference Information
Committee IMQ
Conference Date 2017/12/15(1days)
Place (in Japanese) (See Japanese page)
Place (in English) Shizuoka University, Hamamatsu Campus
Topics (in Japanese) (See Japanese page)
Topics (in English) Picture Display, etc.
Chair Kenji Sugiyama(Seikei Univ.)
Vice Chair Toshiya Nakaguchi(Chiba Univ.) / Mitsuru Maeda(Canon)
Secretary Toshiya Nakaguchi(Nagoya Univ.) / Mitsuru Maeda(Sony)
Assistant Masaru Tsuchida(NTT) / Gosuke Ohashi(Shizuoka Univ.)

Paper Information
Registration To Technical Committee on Image Media Quality
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Estimation by non-negative matrix factorization of dislocation regions in photoluminescence image of multicrystalline silicon
Sub Title (in English)
Keyword(1) multicrystalline silicon
Keyword(2) photoluminescence image
Keyword(3) dislocation
Keyword(4) non-negative matrix factorization
1st Author's Name Hiroaki Kudo
1st Author's Affiliation Nagoya University(Nagoya Univ.)
2nd Author's Name Yusuke Hayama
2nd Author's Affiliation Nagoya University(Nagoya Univ.)
3rd Author's Name Tetsuya Matsumoto
3rd Author's Affiliation Nagoya University(Nagoya Univ.)
4th Author's Name Kentaro Kutsukake
4th Author's Affiliation Nagoya University(Nagoya Univ.)
5th Author's Name Noritaka Usami
5th Author's Affiliation Nagoya University(Nagoya Univ.)
Date 2017-12-15
Paper # IMQ2017-22
Volume (vol) vol.117
Number (no) IMQ-356
Page pp.pp.13-18(IMQ),
#Pages 6
Date of Issue 2017-12-08 (IMQ)