Presentation | 2017-12-15 Estimation by non-negative matrix factorization of dislocation regions in photoluminescence image of multicrystalline silicon Hiroaki Kudo, Yusuke Hayama, Tetsuya Matsumoto, Kentaro Kutsukake, Noritaka Usami, |
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PDF Download Page | PDF download Page Link |
Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | In this report, we studied a specified method of regions including dislocations which are crystallographic defects in a photoluminescence (PL) image of multicrystalline silicon wafers. We utilized a method of non-negative matrix factorization (NMF) to reconstruct the wafer image. We assumed regions of dislocations caused large represent errors and presented darker colors. We obtained effective results by the proposed method than results of sparse coding methods using bases based on independent component analysis or NMF. Sparse coding methods allow negative values as coefficients matrix. As sample images of the learning process, images without dislocations lead effective results. |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | multicrystalline silicon / photoluminescence image / dislocation / non-negative matrix factorization |
Paper # | IMQ2017-22 |
Date of Issue | 2017-12-08 (IMQ) |
Conference Information | |
Committee | IMQ |
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Conference Date | 2017/12/15(1days) |
Place (in Japanese) | (See Japanese page) |
Place (in English) | Shizuoka University, Hamamatsu Campus |
Topics (in Japanese) | (See Japanese page) |
Topics (in English) | Picture Display, etc. |
Chair | Kenji Sugiyama(Seikei Univ.) |
Vice Chair | Toshiya Nakaguchi(Chiba Univ.) / Mitsuru Maeda(Canon) |
Secretary | Toshiya Nakaguchi(Nagoya Univ.) / Mitsuru Maeda(Sony) |
Assistant | Masaru Tsuchida(NTT) / Gosuke Ohashi(Shizuoka Univ.) |
Paper Information | |
Registration To | Technical Committee on Image Media Quality |
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Language | JPN |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | Estimation by non-negative matrix factorization of dislocation regions in photoluminescence image of multicrystalline silicon |
Sub Title (in English) | |
Keyword(1) | multicrystalline silicon |
Keyword(2) | photoluminescence image |
Keyword(3) | dislocation |
Keyword(4) | non-negative matrix factorization |
1st Author's Name | Hiroaki Kudo |
1st Author's Affiliation | Nagoya University(Nagoya Univ.) |
2nd Author's Name | Yusuke Hayama |
2nd Author's Affiliation | Nagoya University(Nagoya Univ.) |
3rd Author's Name | Tetsuya Matsumoto |
3rd Author's Affiliation | Nagoya University(Nagoya Univ.) |
4th Author's Name | Kentaro Kutsukake |
4th Author's Affiliation | Nagoya University(Nagoya Univ.) |
5th Author's Name | Noritaka Usami |
5th Author's Affiliation | Nagoya University(Nagoya Univ.) |
Date | 2017-12-15 |
Paper # | IMQ2017-22 |
Volume (vol) | vol.117 |
Number (no) | IMQ-356 |
Page | pp.pp.13-18(IMQ), |
#Pages | 6 |
Date of Issue | 2017-12-08 (IMQ) |