Presentation 2017-12-22
Effect of SiOx capping film on crystallization of Ge film by flash lamp annealing
Naoki Yoshioka, Yoshiki Akita, Akira Heya, Naoto Matsuo, Kazuyuki Kohama, Kazuhiro Itou,
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Abstract(in Japanese) (See Japanese page)
Abstract(in English)
Keyword(in Japanese) (See Japanese page)
Keyword(in English)
Paper # EID2017-26,SDM2017-87
Date of Issue 2017-12-15 (EID, SDM)

Conference Information
Committee SDM / EID
Conference Date 2017/12/22(1days)
Place (in Japanese) (See Japanese page)
Place (in English) Kyoto University
Topics (in Japanese) (See Japanese page)
Topics (in English) Si, Si-related materials, device process, electron devices, and display technology
Chair Tatsuya Kunikiyo(Renesas) / Yuko Kominami(Shizuoka Univ.)
Vice Chair Takahiro Shinada(Tohoku Univ.) / Mutsumi Kimura(Ryukoku Univ.)
Secretary Takahiro Shinada(Tohoku Univ.) / Mutsumi Kimura(Renesas)
Assistant Hiroya Ikeda(Shizuoka Univ.) / Tetsu Morooka(TOSHIBA MEMORY) / Rumiko Yamaguchi(Akita Univ.) / Hiroyuki Nitta(Japan Display) / Mitsuru Nakata(NHK) / Ryosuke Nonaka(Toshiba) / Takeshi Okuno(Huawei) / Tomokazu Shiga(Univ. of Electro-Comm.)

Paper Information
Registration To Technical Committee on Silicon Device and Materials / Technical Committee on Electronic Information Displays
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Effect of SiOx capping film on crystallization of Ge film by flash lamp annealing
Sub Title (in English)
Keyword(1)
1st Author's Name Naoki Yoshioka
1st Author's Affiliation University of Hyogo(Univ of Hyogo)
2nd Author's Name Yoshiki Akita
2nd Author's Affiliation University of Hyogo(Univ of Hyogo)
3rd Author's Name Akira Heya
3rd Author's Affiliation University of Hyogo(Univ of Hyogo)
4th Author's Name Naoto Matsuo
4th Author's Affiliation University of Hyogo(Univ of Hyogo)
5th Author's Name Kazuyuki Kohama
5th Author's Affiliation Osaka University(Osaka Univ)
6th Author's Name Kazuhiro Itou
6th Author's Affiliation Osaka University(Osaka Univ)
Date 2017-12-22
Paper # EID2017-26,SDM2017-87
Volume (vol) vol.117
Number (no) EID-372,SDM-373
Page pp.pp.77-80(EID), pp.77-80(SDM),
#Pages 4
Date of Issue 2017-12-15 (EID, SDM)