Presentation | 2017-12-22 Characteristic Evaluation of GaSnO Thin Films deposited using Mist Chemical Vapor Deposition Ryugo Okamoto, Hiroki Fukushima, Tokiyoshi Matsuda, Mutsumi Kimura, |
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PDF Download Page | PDF download Page Link |
Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | |
Paper # | EID2017-23,SDM2017-84 |
Date of Issue | 2017-12-15 (EID, SDM) |
Conference Information | |
Committee | SDM / EID |
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Conference Date | 2017/12/22(1days) |
Place (in Japanese) | (See Japanese page) |
Place (in English) | Kyoto University |
Topics (in Japanese) | (See Japanese page) |
Topics (in English) | Si, Si-related materials, device process, electron devices, and display technology |
Chair | Tatsuya Kunikiyo(Renesas) / Yuko Kominami(Shizuoka Univ.) |
Vice Chair | Takahiro Shinada(Tohoku Univ.) / Mutsumi Kimura(Ryukoku Univ.) |
Secretary | Takahiro Shinada(Tohoku Univ.) / Mutsumi Kimura(Renesas) |
Assistant | Hiroya Ikeda(Shizuoka Univ.) / Tetsu Morooka(TOSHIBA MEMORY) / Rumiko Yamaguchi(Akita Univ.) / Hiroyuki Nitta(Japan Display) / Mitsuru Nakata(NHK) / Ryosuke Nonaka(Toshiba) / Takeshi Okuno(Huawei) / Tomokazu Shiga(Univ. of Electro-Comm.) |
Paper Information | |
Registration To | Technical Committee on Silicon Device and Materials / Technical Committee on Electronic Information Displays |
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Language | JPN |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | Characteristic Evaluation of GaSnO Thin Films deposited using Mist Chemical Vapor Deposition |
Sub Title (in English) | |
Keyword(1) | |
1st Author's Name | Ryugo Okamoto |
1st Author's Affiliation | Ryukoku University(Ryukoku Univ) |
2nd Author's Name | Hiroki Fukushima |
2nd Author's Affiliation | Ryukoku University(Ryukoku Univ) |
3rd Author's Name | Tokiyoshi Matsuda |
3rd Author's Affiliation | Ryukoku University(Ryukoku Univ.) |
4th Author's Name | Mutsumi Kimura |
4th Author's Affiliation | Ryukoku University(Ryukoku Univ) |
Date | 2017-12-22 |
Paper # | EID2017-23,SDM2017-84 |
Volume (vol) | vol.117 |
Number (no) | EID-372,SDM-373 |
Page | pp.pp.63-66(EID), pp.63-66(SDM), |
#Pages | 4 |
Date of Issue | 2017-12-15 (EID, SDM) |