Presentation 2017-12-22
Characteristic Evaluation of GaSnO Thin Films deposited using Mist Chemical Vapor Deposition
Ryugo Okamoto, Hiroki Fukushima, Tokiyoshi Matsuda, Mutsumi Kimura,
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Abstract(in Japanese) (See Japanese page)
Abstract(in English)
Keyword(in Japanese) (See Japanese page)
Keyword(in English)
Paper # EID2017-23,SDM2017-84
Date of Issue 2017-12-15 (EID, SDM)

Conference Information
Committee SDM / EID
Conference Date 2017/12/22(1days)
Place (in Japanese) (See Japanese page)
Place (in English) Kyoto University
Topics (in Japanese) (See Japanese page)
Topics (in English) Si, Si-related materials, device process, electron devices, and display technology
Chair Tatsuya Kunikiyo(Renesas) / Yuko Kominami(Shizuoka Univ.)
Vice Chair Takahiro Shinada(Tohoku Univ.) / Mutsumi Kimura(Ryukoku Univ.)
Secretary Takahiro Shinada(Tohoku Univ.) / Mutsumi Kimura(Renesas)
Assistant Hiroya Ikeda(Shizuoka Univ.) / Tetsu Morooka(TOSHIBA MEMORY) / Rumiko Yamaguchi(Akita Univ.) / Hiroyuki Nitta(Japan Display) / Mitsuru Nakata(NHK) / Ryosuke Nonaka(Toshiba) / Takeshi Okuno(Huawei) / Tomokazu Shiga(Univ. of Electro-Comm.)

Paper Information
Registration To Technical Committee on Silicon Device and Materials / Technical Committee on Electronic Information Displays
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Characteristic Evaluation of GaSnO Thin Films deposited using Mist Chemical Vapor Deposition
Sub Title (in English)
Keyword(1)
1st Author's Name Ryugo Okamoto
1st Author's Affiliation Ryukoku University(Ryukoku Univ)
2nd Author's Name Hiroki Fukushima
2nd Author's Affiliation Ryukoku University(Ryukoku Univ)
3rd Author's Name Tokiyoshi Matsuda
3rd Author's Affiliation Ryukoku University(Ryukoku Univ.)
4th Author's Name Mutsumi Kimura
4th Author's Affiliation Ryukoku University(Ryukoku Univ)
Date 2017-12-22
Paper # EID2017-23,SDM2017-84
Volume (vol) vol.117
Number (no) EID-372,SDM-373
Page pp.pp.63-66(EID), pp.63-66(SDM),
#Pages 4
Date of Issue 2017-12-15 (EID, SDM)