| Presentation | 2017-12-07 Fabrication of vertical PN junction phase shifter for Si optical modulator based on strip loaded waveguide Yuriko Maegami, Guangwei Cong, Morifumi Ohno, Makoto Okano, Kazuto Itoh, Nobuhiko Nishiyama, Shigehisa Arai, Koji Yamada, |
|---|---|
| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We fabricate a silicon optical phase shifter based on hydrogenated amorphous silicon (a-Si:H) strip-loaded waveguides on a silicon on insulator (SOI) platform by using a complementary metal-oxide semiconductor (CMOS) compatible process without half etching of the SOI layer. A vertical p-n junction is controllably constructed with ion implantation in a flat etchless SOI layer. The waveguide structure based on a thin a-Si:H strip line is formed by applying a controllable and uniform deposition process and having an etching stop layer. In detail evaluation of the fabricated device, the precisely formed core shape is confirmed by scanning transmission electron microscopy (STEM) observation and the uniformity of carrier profile is analyzed by secondary ion mass spectrometry (SIMS) and a scanning capacitance microscope (SCM). As modulation performances, the modulator provides 0.7- to 2-Vcm modulation efficiency and 28-Gbps high-speed operation. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Modulator / Vertical p-n junction / Strip-loaded waveguide / Silicon photonics |
| Paper # | OPE2017-92 |
| Date of Issue | 2017-11-30 (OPE) |
| Conference Information | |
| Committee | OPE |
|---|---|
| Conference Date | 2017/12/7(2days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | Kazutoshi Kato(Kyushu Univ.) |
| Vice Chair | Kouki Sato(Furukawa Electric Industries) |
| Secretary | Kouki Sato(NTT) |
| Assistant | Takuo Tanemura(Univ. of Tokyo) / Naokatsu Yamamoto(NICT) |
| Paper Information | |
| Registration To | Technical Committee on OptoElectronics |
|---|---|
| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Fabrication of vertical PN junction phase shifter for Si optical modulator based on strip loaded waveguide |
| Sub Title (in English) | |
| Keyword(1) | Modulator |
| Keyword(2) | Vertical p-n junction |
| Keyword(3) | Strip-loaded waveguide |
| Keyword(4) | Silicon photonics |
| 1st Author's Name | Yuriko Maegami |
| 1st Author's Affiliation | National Institute of Advanced Industrial Science and Technology(AIST) |
| 2nd Author's Name | Guangwei Cong |
| 2nd Author's Affiliation | National Institute of Advanced Industrial Science and Technology(AIST) |
| 3rd Author's Name | Morifumi Ohno |
| 3rd Author's Affiliation | National Institute of Advanced Industrial Science and Technology(AIST) |
| 4th Author's Name | Makoto Okano |
| 4th Author's Affiliation | National Institute of Advanced Industrial Science and Technology(AIST) |
| 5th Author's Name | Kazuto Itoh |
| 5th Author's Affiliation | Tokyo Institute of Technology(Tokyo Tech) |
| 6th Author's Name | Nobuhiko Nishiyama |
| 6th Author's Affiliation | Tokyo Institute of Technology(Tokyo Tech) |
| 7th Author's Name | Shigehisa Arai |
| 7th Author's Affiliation | Tokyo Institute of Technology(Tokyo Tech) |
| 8th Author's Name | Koji Yamada |
| 8th Author's Affiliation | National Institute of Advanced Industrial Science and Technology(AIST) |
| Date | 2017-12-07 |
| Paper # | OPE2017-92 |
| Volume (vol) | vol.117 |
| Number (no) | OPE-339 |
| Page | pp.pp.13-18(OPE), |
| #Pages | 6 |
| Date of Issue | 2017-11-30 (OPE) |