Presentation 2017-11-30
Electrical characteristics of n-GaN Schottky contacts on cleaved surfaces of free-standing substrates
Kenji Shiojima, Hiroyoshi Imadate, Tomoyoshi Mishima,
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Abstract(in Japanese) (See Japanese page)
Abstract(in English) We report electrical characteristics of Schottky contacts with 9 different metals (Ag, Ti, Cr, W, Mo, Au, Pd, Ni, Pt) formed on clean m-plane surfaces by cleaving free-standing GaN substrates, comparing with the contacts on Ga-polar c-plane n-GaN surfaces grown on GaN substrates. The n-values in the forward current-voltage (I-V) characteristics are as good as 1.02 to 1.05 for the m-plane and 1.02 to 1.09 for the c-plane samples. We found that the reverse I-V curves of the both samples can be explained with the thermionic field emission theory, and the m-plane contacts have a metal work-function dependence of Schottky barrier heights as large as that of the Ga-polar c-plane n-GaN contacts. These results tell us that the cleaving method can provide the clean m-plane surfaces where Fermi-level pinning is as small as those of the c-plane.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) m-plane GaN / cleaving / metal workfunction / Schottky contact
Paper # ED2017-56,CPM2017-99,LQE2017-69
Date of Issue 2017-11-23 (ED, CPM, LQE)

Conference Information
Committee LQE / CPM / ED
Conference Date 2017/11/30(2days)
Place (in Japanese) (See Japanese page)
Place (in English) Nagoya Inst. tech.
Topics (in Japanese) (See Japanese page)
Topics (in English) Nitride Semiconductor Devices, Materials, Related Technologies
Chair Tsuyoshi Yamamoto(Fujitsu Labs.) / Fumihiko Hirose(Yamagata Univ.) / Kunio Tsuda(Toshiba)
Vice Chair Kiichi Hamamoto(Kyusyu Univ.) / Mayumi Takeyama(Kitami Inst. of Tech.) / Michihiko Suhara(TMU)
Secretary Kiichi Hamamoto(Tohoku Univ.) / Mayumi Takeyama(SEI) / Michihiko Suhara(Nihon Univ.)
Assistant Yasumasa Kawakita(Furukawa Electric Industries) / Naoki Fujiwara(NTT) / Yuichi Akage(NTT) / Toshiyuki Oishi(Saga Univ.) / Tatsuya Iwata(TUT)

Paper Information
Registration To Technical Committee on Lasers and Quantum Electronics / Technical Committee on Component Parts and Materials / Technical Committee on Electron Devices
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Electrical characteristics of n-GaN Schottky contacts on cleaved surfaces of free-standing substrates
Sub Title (in English) Metal workfunction dependence of Schottky barrier height
Keyword(1) m-plane GaN
Keyword(2) cleaving
Keyword(3) metal workfunction
Keyword(4) Schottky contact
1st Author's Name Kenji Shiojima
1st Author's Affiliation University of Fukui(Univ. of Fukui)
2nd Author's Name Hiroyoshi Imadate
2nd Author's Affiliation University of Fukui(Univ. of Fukui)
3rd Author's Name Tomoyoshi Mishima
3rd Author's Affiliation Hosei University(Hosei Univ.)
Date 2017-11-30
Paper # ED2017-56,CPM2017-99,LQE2017-69
Volume (vol) vol.117
Number (no) ED-331,CPM-332,LQE-333
Page pp.pp.33-38(ED), pp.33-38(CPM), pp.33-38(LQE),
#Pages 6
Date of Issue 2017-11-23 (ED, CPM, LQE)