| Presentation | 2017-11-09 [Invited Talk] Multri-Physics Simulation of GaN MOVPE Growth Kenji Shiraishi, Kazuki Sekiguchi, Kenta Chokawa, Hiroki Shirakawa, Kento Kawakami, Yoshihiro Yamamoto, Masaaki Araidai, Naoya Okamoto, Katsumori Yoshimatsu, Yoshihiro Kangawa, Koichi Kakimoto, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | In conventional GaN growth simulations, it has been believed that tri-methyl-gallium (TMG) first react with ammonia forming adducts. This adducts change into GaN units after complicated reaction in vapor phase and these GaN units adsorb onto substrate. However, our first principles and thermodynamic analysis shows that adduct formation is not main reaction. Moreover, we unify first principles calculations, thermodynamics analysis and fluid dynamic simulations. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | GaN / MOVPE growth / First principles calculations / Thermodynamic analysis / Fluid dynamics / Multi-physics simulations |
| Paper # | SDM2017-61 |
| Date of Issue | 2017-11-02 (SDM) |
| Conference Information | |
| Committee | SDM |
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| Conference Date | 2017/11/9(2days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Kikai-Shinko-Kaikan Bldg. |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | Process, Device, Circuit simulation, etc. |
| Chair | Tatsuya Kunikiyo(Renesas) |
| Vice Chair | Takahiro Shinada(Tohoku Univ.) |
| Secretary | Takahiro Shinada(Tohoku Univ.) |
| Assistant | Hiroya Ikeda(Shizuoka Univ.) / Tetsu Morooka(TOSHIBA MEMORY) |
| Paper Information | |
| Registration To | Technical Committee on Silicon Device and Materials |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | [Invited Talk] Multri-Physics Simulation of GaN MOVPE Growth |
| Sub Title (in English) | |
| Keyword(1) | GaN |
| Keyword(2) | MOVPE growth |
| Keyword(3) | First principles calculations |
| Keyword(4) | Thermodynamic analysis |
| Keyword(5) | Fluid dynamics |
| Keyword(6) | Multi-physics simulations |
| 1st Author's Name | Kenji Shiraishi |
| 1st Author's Affiliation | Nagoya University(Nagoya Univ.) |
| 2nd Author's Name | Kazuki Sekiguchi |
| 2nd Author's Affiliation | Nagoya University(Nagoya Univ.) |
| 3rd Author's Name | Kenta Chokawa |
| 3rd Author's Affiliation | Nagoya University(Nagoya Univ.) |
| 4th Author's Name | Hiroki Shirakawa |
| 4th Author's Affiliation | Nagoya University(Nagoya Univ.) |
| 5th Author's Name | Kento Kawakami |
| 5th Author's Affiliation | Nagoya University(Nagoya Univ.) |
| 6th Author's Name | Yoshihiro Yamamoto |
| 6th Author's Affiliation | Nagoya University(Nagoya Univ.) |
| 7th Author's Name | Masaaki Araidai |
| 7th Author's Affiliation | Nagoya University(Nagoya Univ.) |
| 8th Author's Name | Naoya Okamoto |
| 8th Author's Affiliation | Nagoya University(Nagoya Univ.) |
| 9th Author's Name | Katsumori Yoshimatsu |
| 9th Author's Affiliation | Nagoya University(Nagoya Univ.) |
| 10th Author's Name | Yoshihiro Kangawa |
| 10th Author's Affiliation | Kyushu University(Kyushu Univ.) |
| 11th Author's Name | Koichi Kakimoto |
| 11th Author's Affiliation | Kyushu University(Kyushu Univ.) |
| Date | 2017-11-09 |
| Paper # | SDM2017-61 |
| Volume (vol) | vol.117 |
| Number (no) | SDM-290 |
| Page | pp.pp.1-4(SDM), |
| #Pages | 4 |
| Date of Issue | 2017-11-02 (SDM) |