Presentation 2017-10-26
Tungsten carbide cathode growth process and emission characteristic
Ryotaro Yamanashi, Yoichiro Neo, Hidenori Mimura,
PDF Download Page PDF download Page Link
Abstract(in Japanese) (See Japanese page)
Abstract(in English) High brightness and stable cathode has been required for SEM use. Tungsten based field emission cathode(W-FE) has been used for SEM as high brightness and narrow energy distribution cathode compare with thermal emission. However, single crystal W-FE has some problems, that is expensive and complex for modification by regular flashing process. In order to overcome these problems, we have been studied about Tungsten Carbide(WC) field emission cathode. WC is known as low workfunction material. In this work, we report the process of carbonizing and I-V characteristics of WC-FE.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) Field emission cathode / Workfunction / Tungsten / Tungsten carbide
Paper # ED2017-42
Date of Issue 2017-10-19 (ED)

Conference Information
Committee ED
Conference Date 2017/10/26(2days)
Place (in Japanese) (See Japanese page)
Place (in English)
Topics (in Japanese) (See Japanese page)
Topics (in English)
Chair Kunio Tsuda(Toshiba)
Vice Chair Michihiko Suhara(TMU)
Secretary Michihiko Suhara(New JRC)
Assistant Toshiyuki Oishi(Saga Univ.) / Tatsuya Iwata(TUT)

Paper Information
Registration To Technical Committee on Electron Devices
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Tungsten carbide cathode growth process and emission characteristic
Sub Title (in English)
Keyword(1) Field emission cathode
Keyword(2) Workfunction
Keyword(3) Tungsten
Keyword(4) Tungsten carbide
1st Author's Name Ryotaro Yamanashi
1st Author's Affiliation Shizuoka University(Shizuoka Univ.)
2nd Author's Name Yoichiro Neo
2nd Author's Affiliation Shizuoka University(Shizuoka Univ.)
3rd Author's Name Hidenori Mimura
3rd Author's Affiliation Shizuoka University(Shizuoka Univ.)
Date 2017-10-26
Paper # ED2017-42
Volume (vol) vol.117
Number (no) ED-267
Page pp.pp.27-29(ED),
#Pages 3
Date of Issue 2017-10-19 (ED)