| Presentation | 2017-10-26 [Invited Talk] Utilization of Big Data for Innovation in Semiconductor Memory Manufacturing Hiroshi Akahori, Kouta Nakata, Ryohei Orihara, Yoshiaki Mizuoka, Kentaro Takagi, Kenichi Kadota, Takaharu Nishimura, Yukako Tanaka, Hidetaka Eguchi, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | In this work, we focus on yield analysis task where engineers identify the cause of failure from wafer failure map patterns and manufacturing histories. We organize yield analysis task into 3 stages, failure map pattern monitoring, failure cause identification and failure recurrence monitoring, and incorporate machine learning and data mining technologies into each stage to support engineers' work. The important point is that big data analysis enables comprehensive and long-term monitoring automation. Machine learning and data mining techniques are integrated into a real automated monitoring system with interfaces familiar to engineers to attain large yield enhancement. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Big-Data / Semiconductor / Yield Analysis / Machine Learning / Data Mining |
| Paper # | SDM2017-55 |
| Date of Issue | 2017-10-18 (SDM) |
| Conference Information | |
| Committee | SDM |
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| Conference Date | 2017/10/25(2days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Niche, Tohoku Univ. |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | Process Science and New Process Technology |
| Chair | Tatsuya Kunikiyo(Renesas) |
| Vice Chair | Takahiro Shinada(Tohoku Univ.) |
| Secretary | Takahiro Shinada(Tohoku Univ.) |
| Assistant | Hiroya Ikeda(Shizuoka Univ.) / Tetsu Morooka(TOSHIBA MEMORY) |
| Paper Information | |
| Registration To | Technical Committee on Silicon Device and Materials |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | [Invited Talk] Utilization of Big Data for Innovation in Semiconductor Memory Manufacturing |
| Sub Title (in English) | Comprehensive Big-Data-Based Monitoring System for Yield Analysis in Semiconductor Manufacturing |
| Keyword(1) | Big-Data |
| Keyword(2) | Semiconductor |
| Keyword(3) | Yield Analysis |
| Keyword(4) | Machine Learning |
| Keyword(5) | Data Mining |
| 1st Author's Name | Hiroshi Akahori |
| 1st Author's Affiliation | Toshiba Memory Corporation(Toshiba Memory) |
| 2nd Author's Name | Kouta Nakata |
| 2nd Author's Affiliation | Toshiba Corporation(Toshiba) |
| 3rd Author's Name | Ryohei Orihara |
| 3rd Author's Affiliation | Toshiba Corporation(Toshiba) |
| 4th Author's Name | Yoshiaki Mizuoka |
| 4th Author's Affiliation | Toshiba Corporation(Toshiba) |
| 5th Author's Name | Kentaro Takagi |
| 5th Author's Affiliation | Toshiba Corporation(Toshiba) |
| 6th Author's Name | Kenichi Kadota |
| 6th Author's Affiliation | Toshiba Memory Corporation(Toshiba Memory) |
| 7th Author's Name | Takaharu Nishimura |
| 7th Author's Affiliation | Toshiba Memory Corporation(Toshiba Memory) |
| 8th Author's Name | Yukako Tanaka |
| 8th Author's Affiliation | Toshiba Memory Corporation(Toshiba Memory) |
| 9th Author's Name | Hidetaka Eguchi |
| 9th Author's Affiliation | Toshiba Memory Corporation(Toshiba Memory) |
| Date | 2017-10-26 |
| Paper # | SDM2017-55 |
| Volume (vol) | vol.117 |
| Number (no) | SDM-260 |
| Page | pp.pp.31-33(SDM), |
| #Pages | 3 |
| Date of Issue | 2017-10-18 (SDM) |