| Presentation | 2017-10-26 A High Sensitivity Realtime Compact Gas Concentration Sensor using UV absorption spectroscopy and Charge Amplifier Circuit Hidekazu Ishii, Masaaki Nagase, Nobukazu Ikeda, Yoshinobu Shiba, Yasuyuki Shirai, Rihito Kuroda, Shigetoshi Sugawa, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Metal organic (MO) gases are used in electronic device manufacturing processes such as semiconductors, power devices, LEDs, displays. It is usually controlled by in-line gas concentration sensor in the concentration control of the supply gas. However, due to the advancement of manufacturing process, a gas concentration sensor capable of monitoring a wide range of concentration measurements in real time with high sensitivity and high accuracy is required. Until now, gas concentration sensor of the ultrasonic method and the near infrared absorption method have been used, but there are some issues with versatility and sensitivity. In our research, based on the light absorption characteristics of MO gases in the ultraviolet light region of 400 nm or less in wavelength, we investigated concentration measurement by ultraviolet absorbance measurement method. A prototype compact unit that adopts a high seal gas cell was manufactured, and a detection circuit section was made by adopting a charge amplifier method that can measure high sensitivity, rather than a transimpedance amplifier method that is usually used for the detection circuit section. In the evaluation by the commonly used metal organic gas material. Compared to the ultrasonic method and the near infrared absorbance measurement method, it was demonstrated that the developed sensor is compact, and it has high sensitivity and real-time concentration measurement capability with response time of less than 1 sec. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | gas concentration sensor / charge amplifier circuit / metal organic gas |
| Paper # | SDM2017-56 |
| Date of Issue | 2017-10-18 (SDM) |
| Conference Information | |
| Committee | SDM |
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| Conference Date | 2017/10/25(2days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Niche, Tohoku Univ. |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | Process Science and New Process Technology |
| Chair | Tatsuya Kunikiyo(Renesas) |
| Vice Chair | Takahiro Shinada(Tohoku Univ.) |
| Secretary | Takahiro Shinada(Tohoku Univ.) |
| Assistant | Hiroya Ikeda(Shizuoka Univ.) / Tetsu Morooka(TOSHIBA MEMORY) |
| Paper Information | |
| Registration To | Technical Committee on Silicon Device and Materials |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | A High Sensitivity Realtime Compact Gas Concentration Sensor using UV absorption spectroscopy and Charge Amplifier Circuit |
| Sub Title (in English) | |
| Keyword(1) | gas concentration sensor |
| Keyword(2) | charge amplifier circuit |
| Keyword(3) | metal organic gas |
| 1st Author's Name | Hidekazu Ishii |
| 1st Author's Affiliation | Tohoku University(Tohoku Univ.) |
| 2nd Author's Name | Masaaki Nagase |
| 2nd Author's Affiliation | Fujikin Inc.(Fujikin Inc.) |
| 3rd Author's Name | Nobukazu Ikeda |
| 3rd Author's Affiliation | Fujikin Inc.(Fujikin Inc.) |
| 4th Author's Name | Yoshinobu Shiba |
| 4th Author's Affiliation | Tohoku University(Tohoku Univ.) |
| 5th Author's Name | Yasuyuki Shirai |
| 5th Author's Affiliation | Tohoku University(Tohoku Univ.) |
| 6th Author's Name | Rihito Kuroda |
| 6th Author's Affiliation | Tohoku University(Tohoku Univ.) |
| 7th Author's Name | Shigetoshi Sugawa |
| 7th Author's Affiliation | Tohoku University(Tohoku Univ.) |
| Date | 2017-10-26 |
| Paper # | SDM2017-56 |
| Volume (vol) | vol.117 |
| Number (no) | SDM-260 |
| Page | pp.pp.35-38(SDM), |
| #Pages | 4 |
| Date of Issue | 2017-10-18 (SDM) |