Presentation 2017-11-10
[Invited Talk] Fundamental Aspects of Semiconductor Device Modeling associated with Discrete Impurities
Nobuyuki Sano,
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Abstract(in Japanese) (See Japanese page)
Abstract(in English) The classical and quantum effects associated with discrete impurities on transport characteristics and device modeling in nano-scale semiconductor devices are discussed. We stress the importance of the length-scale implicitly involved in device simulations, which becomes apparent when the continuous description of impurity is switched into the discrete. The physics behind the discrete impurity model employed for Drift-Diffusion simulations is fully explained. Also, the impurity-limited resistance due to localized multiple impurities in quasi-1D nanowires is analytically derived by employing the scattering theory. We then discuss the variability of the resistance and the physical origin of self-averaging which shows up as the channel length gets longer.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) random dopant fluctuations / device simulation / Coulomb potential / nanowire / impurity scattering / multiple-scattering / self-average
Paper # SDM2017-68
Date of Issue 2017-11-02 (SDM)

Conference Information
Committee SDM
Conference Date 2017/11/9(2days)
Place (in Japanese) (See Japanese page)
Place (in English) Kikai-Shinko-Kaikan Bldg.
Topics (in Japanese) (See Japanese page)
Topics (in English) Process, Device, Circuit simulation, etc.
Chair Tatsuya Kunikiyo(Renesas)
Vice Chair Takahiro Shinada(Tohoku Univ.)
Secretary Takahiro Shinada(Tohoku Univ.)
Assistant Hiroya Ikeda(Shizuoka Univ.) / Tetsu Morooka(TOSHIBA MEMORY)

Paper Information
Registration To Technical Committee on Silicon Device and Materials
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) [Invited Talk] Fundamental Aspects of Semiconductor Device Modeling associated with Discrete Impurities
Sub Title (in English) Random Dopant Fluctuations and Self-Averaging
Keyword(1) random dopant fluctuations
Keyword(2) device simulation
Keyword(3) Coulomb potential
Keyword(4) nanowire
Keyword(5) impurity scattering
Keyword(6) multiple-scattering
Keyword(7) self-average
1st Author's Name Nobuyuki Sano
1st Author's Affiliation University of Tsukuba(Univ. Tsukuba)
Date 2017-11-10
Paper # SDM2017-68
Volume (vol) vol.117
Number (no) SDM-290
Page pp.pp.37-42(SDM),
#Pages 6
Date of Issue 2017-11-02 (SDM)