Presentation | 2017-11-10 [Invited Talk] Fundamental Aspects of Semiconductor Device Modeling associated with Discrete Impurities Nobuyuki Sano, |
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PDF Download Page | PDF download Page Link |
Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | The classical and quantum effects associated with discrete impurities on transport characteristics and device modeling in nano-scale semiconductor devices are discussed. We stress the importance of the length-scale implicitly involved in device simulations, which becomes apparent when the continuous description of impurity is switched into the discrete. The physics behind the discrete impurity model employed for Drift-Diffusion simulations is fully explained. Also, the impurity-limited resistance due to localized multiple impurities in quasi-1D nanowires is analytically derived by employing the scattering theory. We then discuss the variability of the resistance and the physical origin of self-averaging which shows up as the channel length gets longer. |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | random dopant fluctuations / device simulation / Coulomb potential / nanowire / impurity scattering / multiple-scattering / self-average |
Paper # | SDM2017-68 |
Date of Issue | 2017-11-02 (SDM) |
Conference Information | |
Committee | SDM |
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Conference Date | 2017/11/9(2days) |
Place (in Japanese) | (See Japanese page) |
Place (in English) | Kikai-Shinko-Kaikan Bldg. |
Topics (in Japanese) | (See Japanese page) |
Topics (in English) | Process, Device, Circuit simulation, etc. |
Chair | Tatsuya Kunikiyo(Renesas) |
Vice Chair | Takahiro Shinada(Tohoku Univ.) |
Secretary | Takahiro Shinada(Tohoku Univ.) |
Assistant | Hiroya Ikeda(Shizuoka Univ.) / Tetsu Morooka(TOSHIBA MEMORY) |
Paper Information | |
Registration To | Technical Committee on Silicon Device and Materials |
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Language | JPN |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | [Invited Talk] Fundamental Aspects of Semiconductor Device Modeling associated with Discrete Impurities |
Sub Title (in English) | Random Dopant Fluctuations and Self-Averaging |
Keyword(1) | random dopant fluctuations |
Keyword(2) | device simulation |
Keyword(3) | Coulomb potential |
Keyword(4) | nanowire |
Keyword(5) | impurity scattering |
Keyword(6) | multiple-scattering |
Keyword(7) | self-average |
1st Author's Name | Nobuyuki Sano |
1st Author's Affiliation | University of Tsukuba(Univ. Tsukuba) |
Date | 2017-11-10 |
Paper # | SDM2017-68 |
Volume (vol) | vol.117 |
Number (no) | SDM-290 |
Page | pp.pp.37-42(SDM), |
#Pages | 6 |
Date of Issue | 2017-11-02 (SDM) |