| Presentation | 2017-10-26 Pinning Voltage Control of CMOS Image Sensor by measuring sheet resistance at micro test structure in scribe line Yotaro Goto, Tadasihi Yamaguchi, Masazumi Matsuura, Koji Iizuka, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | |
| Paper # | SDM2017-59 |
| Date of Issue | 2017-10-18 (SDM) |
| Conference Information | |
| Committee | SDM |
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| Conference Date | 2017/10/25(2days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Niche, Tohoku Univ. |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | Process Science and New Process Technology |
| Chair | Tatsuya Kunikiyo(Renesas) |
| Vice Chair | Takahiro Shinada(Tohoku Univ.) |
| Secretary | Takahiro Shinada(Tohoku Univ.) |
| Assistant | Hiroya Ikeda(Shizuoka Univ.) / Tetsu Morooka(TOSHIBA MEMORY) |
| Paper Information | |
| Registration To | Technical Committee on Silicon Device and Materials |
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| Language | ENG-JTITLE |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Pinning Voltage Control of CMOS Image Sensor by measuring sheet resistance at micro test structure in scribe line |
| Sub Title (in English) | |
| Keyword(1) | |
| 1st Author's Name | Yotaro Goto |
| 1st Author's Affiliation | Renesas Semiconductor Manufacturing Co., Ltd.(RSMC) |
| 2nd Author's Name | Tadasihi Yamaguchi |
| 2nd Author's Affiliation | Renesas Electronics(REL) |
| 3rd Author's Name | Masazumi Matsuura |
| 3rd Author's Affiliation | Renesas Electronics(REL) |
| 4th Author's Name | Koji Iizuka |
| 4th Author's Affiliation | Renesas Semiconductor Manufacturing Co., Ltd.(RSMC) |
| Date | 2017-10-26 |
| Paper # | SDM2017-59 |
| Volume (vol) | vol.117 |
| Number (no) | SDM-260 |
| Page | pp.pp.51-55(SDM), |
| #Pages | 5 |
| Date of Issue | 2017-10-18 (SDM) |