| Presentation | 2017-10-25 Nanoscale conformal doping technology by spin on diffusion source Tetsuro Kinoshita, Shunichi Mashita, Takuya Ohashi, Yoshihiro Sawada, Yohei Kinoshita, Satoshi Fujimura, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We developed a coating material which can form nanoscale conformal film on the wafer with 3D structure. In this study, conformal doping to 3D structure and control of diffusion profile by tuning the process condition were demonstrated by using the coating material introduced various kinds of dopant element. This technique can be applied to the conformal doping process to FinFET or DTI of CIS with 3D structure. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | conformal / doping / diffusion / image sensor / FinFET |
| Paper # | SDM2017-53 |
| Date of Issue | 2017-10-18 (SDM) |
| Conference Information | |
| Committee | SDM |
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| Conference Date | 2017/10/25(2days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Niche, Tohoku Univ. |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | Process Science and New Process Technology |
| Chair | Tatsuya Kunikiyo(Renesas) |
| Vice Chair | Takahiro Shinada(Tohoku Univ.) |
| Secretary | Takahiro Shinada(Tohoku Univ.) |
| Assistant | Hiroya Ikeda(Shizuoka Univ.) / Tetsu Morooka(TOSHIBA MEMORY) |
| Paper Information | |
| Registration To | Technical Committee on Silicon Device and Materials |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Nanoscale conformal doping technology by spin on diffusion source |
| Sub Title (in English) | |
| Keyword(1) | conformal |
| Keyword(2) | doping |
| Keyword(3) | diffusion |
| Keyword(4) | image sensor |
| Keyword(5) | FinFET |
| 1st Author's Name | Tetsuro Kinoshita |
| 1st Author's Affiliation | Tokyo Ohka Kogyo co., LTD.(TOK) |
| 2nd Author's Name | Shunichi Mashita |
| 2nd Author's Affiliation | Tokyo Ohka Kogyo co., LTD.(TOK) |
| 3rd Author's Name | Takuya Ohashi |
| 3rd Author's Affiliation | Tokyo Ohka Kogyo co., LTD.(TOK) |
| 4th Author's Name | Yoshihiro Sawada |
| 4th Author's Affiliation | Tokyo Ohka Kogyo co., LTD.(TOK) |
| 5th Author's Name | Yohei Kinoshita |
| 5th Author's Affiliation | Tokyo Ohka Kogyo co., LTD.(TOK) |
| 6th Author's Name | Satoshi Fujimura |
| 6th Author's Affiliation | Tokyo Ohka Kogyo co., LTD.(TOK) |
| Date | 2017-10-25 |
| Paper # | SDM2017-53 |
| Volume (vol) | vol.117 |
| Number (no) | SDM-260 |
| Page | pp.pp.21-24(SDM), |
| #Pages | 4 |
| Date of Issue | 2017-10-18 (SDM) |