Presentation 2017-10-04
Investigation for Improvement of Crystalline Quality of Cr2O3 Thin Film Deposited on Oxide Single Crystal Substrates
Tsubasa Enomoto, Sinjirou Hukui, Tsuyosi Hirato, Takumi Onodera, Tomoko Nagata, Hirosi Yamamoto, Nobuyuki Iwata,
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Abstract(in Japanese) (See Japanese page)
Abstract(in English) We prepared Cr2O3, (Cr0.98Fe0.02)2O3, (Cr0.50Fe0. 50)2O3 thin films on r-plane sapphire and YAlO3 substrates. The (Cr0.98Fe0.02)2O3, (Cr 0 .50Fe0. 50)2O 3 thin films grown on the r-plane sapphire substrate show a strong uniaxial anisotropy. The size of the grains of (Cr0.98Fe0.02)2O3 thin film grown on YAlO3 substrate was about 4 times larger than those of Cr2O3 thin film, and the trenches, which appear between grains boundary, are suppressed by less than 50% as well From the results of 2θ -θ spectra, the calculated lattice constant of out-of-plane of (Cr0.98Fe0.02)2O3 and (Cr0.50Fe0.50)2O3 thin films 0.364 nm, which is same as that of Cr2O3 thin film, and 0.367 nm, which is 1.1% larger than that of at Cr2O3 thin film.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) Cr2O3 / films / YAlO3
Paper # CPM2017-61
Date of Issue 2017-09-27 (CPM)

Conference Information
Committee CPM
Conference Date 2017/10/4(1days)
Place (in Japanese) (See Japanese page)
Place (in English) Kikai-Shinko-Kaikan Bldg.
Topics (in Japanese) (See Japanese page)
Topics (in English)
Chair Fumihiko Hirose(Yamagata Univ.)
Vice Chair Mayumi Takeyama(Kitami Inst. of Tech.)
Secretary Mayumi Takeyama(Nihon Univ.)
Assistant Yuichi Akage(NTT)

Paper Information
Registration To Technical Committee on Component Parts and Materials
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Investigation for Improvement of Crystalline Quality of Cr2O3 Thin Film Deposited on Oxide Single Crystal Substrates
Sub Title (in English)
Keyword(1) Cr2O3
Keyword(2) films
Keyword(3) YAlO3
1st Author's Name Tsubasa Enomoto
1st Author's Affiliation Nihon University(Niti Univ)
2nd Author's Name Sinjirou Hukui
2nd Author's Affiliation Nihon University(Niti Univ)
3rd Author's Name Tsuyosi Hirato
3rd Author's Affiliation Nihon University(Niti Univ)
4th Author's Name Takumi Onodera
4th Author's Affiliation Nihon University(Niti Univ)
5th Author's Name Tomoko Nagata
5th Author's Affiliation Nihon University(Niti Univ)
6th Author's Name Hirosi Yamamoto
6th Author's Affiliation Nihon University(Niti Univ)
7th Author's Name Nobuyuki Iwata
7th Author's Affiliation Nihon University(Niti Univ)
Date 2017-10-04
Paper # CPM2017-61
Volume (vol) vol.117
Number (no) CPM-224
Page pp.pp.11-14(CPM),
#Pages 4
Date of Issue 2017-09-27 (CPM)