| Presentation | 2017-09-01 Wide Wavelength Sweep & Low Voltage Operation of Tunable MEMSVCSEL Employing Mechanical Resonance Shun Nishimura, Masanori Nakahama, Shunya Inoue, Akihiro Matutani, Takahiro Sakaguti, Fumio Koyama, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | WWe demonstrated the low voltage and high speed wavelength sweep operation of 850 nm MEMS VCSELs by using high-Q mechanical resonance of the MEMS structure. At a cantilever length of 106μm, 20 nm sweep operation was achieved with a low sweep voltage of 0.7 Vpp. We estimate that the 50μm-long cantilever device enables us to sweep at a frequency of 746kHz, a bias voltage of 3V and swing voltage of 6Vpp. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | MEMS VCSEL / Micromachine structure / High speed swept source |
| Paper # | R2017-31,EMD2017-25,CPM2017-46,OPE2017-55,LQE2017-28 |
| Date of Issue | 2017-08-24 (R, EMD, CPM, OPE, LQE) |
| Conference Information | |
| Committee | R / EMD / CPM / LQE / OPE |
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| Conference Date | 2017/8/31(2days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | Tetsushi Yuge(National Defense Academy) / Yoshiteru Abe(NTT-AT) / Fumihiko Hirose(Yamagata Univ.) / Tsuyoshi Yamamoto(Fujitsu Labs.) / Kazutoshi Kato(Kyushu Univ.) |
| Vice Chair | Akira Asato(Fujitsu) / / Mayumi Takeyama(Kitami Inst. of Tech.) / Kiichi Hamamoto(Kyusyu Univ.) / Kouki Sato(Furukawa Electric Industries) |
| Secretary | Akira Asato(Hosei Univ.) / (RTRI) / Mayumi Takeyama(Tohoku Gakuin Univ.) / Kiichi Hamamoto(Muroran Inst. of Tech.) / Kouki Sato(Nihon Univ.) |
| Assistant | Shinji Inoue(Kansai Univ.) / Hiroyuki Okamura(Hiroshima Univ.) / Yoshiki Kayano(Univ. of Electro-Comm.) / Yuichi Akage(NTT) / Yasumasa Kawakita(Furukawa Electric Industries) / Naoki Fujiwara(NTT) / Takuo Tanemura(Univ. of Tokyo) |
| Paper Information | |
| Registration To | Technical Committee on Reliability / Technical Committee on Electromechanical Devices / Technical Committee on Component Parts and Materials / Technical Committee on Lasers and Quantum Electronics / Technical Committee on OptoElectronics |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Wide Wavelength Sweep & Low Voltage Operation of Tunable MEMSVCSEL Employing Mechanical Resonance |
| Sub Title (in English) | |
| Keyword(1) | MEMS VCSEL |
| Keyword(2) | Micromachine structure |
| Keyword(3) | High speed swept source |
| Keyword(4) | |
| 1st Author's Name | Shun Nishimura |
| 1st Author's Affiliation | Tokyo Institute of Technology(Tokyo Inst. of Tech.) |
| 2nd Author's Name | Masanori Nakahama |
| 2nd Author's Affiliation | Tokyo Institute of Technology(Tokyo Inst. of Tech.) |
| 3rd Author's Name | Shunya Inoue |
| 3rd Author's Affiliation | Tokyo Institute of Technology(Tokyo Inst. of Tech.) |
| 4th Author's Name | Akihiro Matutani |
| 4th Author's Affiliation | Tokyo Institute of Technology(Tokyo Inst. of Tech.) |
| 5th Author's Name | Takahiro Sakaguti |
| 5th Author's Affiliation | Tokyo Institute of Technology(Tokyo Inst. of Tech.) |
| 6th Author's Name | Fumio Koyama |
| 6th Author's Affiliation | Tokyo Institute of Technology(Tokyo Inst. of Tech.) |
| Date | 2017-09-01 |
| Paper # | R2017-31,EMD2017-25,CPM2017-46,OPE2017-55,LQE2017-28 |
| Volume (vol) | vol.117 |
| Number (no) | R-191,EMD-192,CPM-193,OPE-194,LQE-195 |
| Page | pp.pp.37-40(R), pp.37-40(EMD), pp.37-40(CPM), pp.37-40(OPE), pp.37-40(LQE), |
| #Pages | 4 |
| Date of Issue | 2017-08-24 (R, EMD, CPM, OPE, LQE) |