| Presentation | 2017-08-31 Proposal and Characterization of Hydrogen Gas Sensor Based on Silicon Microring Resonator Sosuke Matsuura, Naoki Yamasaku, Yasuo Kokubun, Yoshiaki Nishijima, Shinji Okazaki, Taro Arakawa, |
|---|---|
| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Compact and highly-sensitive optical hydrogen gas sensor based on the combination of a Pt/WO3 thin film and a silicon microring resonator (MRR) is proposed and its sensing characteristics are experimentally demonstrated. To observe clear shifts in resonant wavelength of the MRR, the thickness of a SiO2 upper cladding layer was designed. The fabricated sensor exhibited the resonant wavelength shift of up to 140 pm when the sensor was exposed to 4 vol.% H2/N2. This result shows that the proposed sensor is promising for highly-sensitive compact gas sensors. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Hydrogen gas / Gas sensor / Tungsten trioxide / Platinum catalyst / Silicon microring resonator |
| Paper # | R2017-29,EMD2017-23,CPM2017-44,OPE2017-53,LQE2017-26 |
| Date of Issue | 2017-08-24 (R, EMD, CPM, OPE, LQE) |
| Conference Information | |
| Committee | R / EMD / CPM / LQE / OPE |
|---|---|
| Conference Date | 2017/8/31(2days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | Tetsushi Yuge(National Defense Academy) / Yoshiteru Abe(NTT-AT) / Fumihiko Hirose(Yamagata Univ.) / Tsuyoshi Yamamoto(Fujitsu Labs.) / Kazutoshi Kato(Kyushu Univ.) |
| Vice Chair | Akira Asato(Fujitsu) / / Mayumi Takeyama(Kitami Inst. of Tech.) / Kiichi Hamamoto(Kyusyu Univ.) / Kouki Sato(Furukawa Electric Industries) |
| Secretary | Akira Asato(Hosei Univ.) / (RTRI) / Mayumi Takeyama(Tohoku Gakuin Univ.) / Kiichi Hamamoto(Muroran Inst. of Tech.) / Kouki Sato(Nihon Univ.) |
| Assistant | Shinji Inoue(Kansai Univ.) / Hiroyuki Okamura(Hiroshima Univ.) / Yoshiki Kayano(Univ. of Electro-Comm.) / Yuichi Akage(NTT) / Yasumasa Kawakita(Furukawa Electric Industries) / Naoki Fujiwara(NTT) / Takuo Tanemura(Univ. of Tokyo) |
| Paper Information | |
| Registration To | Technical Committee on Reliability / Technical Committee on Electromechanical Devices / Technical Committee on Component Parts and Materials / Technical Committee on Lasers and Quantum Electronics / Technical Committee on OptoElectronics |
|---|---|
| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Proposal and Characterization of Hydrogen Gas Sensor Based on Silicon Microring Resonator |
| Sub Title (in English) | |
| Keyword(1) | Hydrogen gas |
| Keyword(2) | Gas sensor |
| Keyword(3) | Tungsten trioxide |
| Keyword(4) | Platinum catalyst |
| Keyword(5) | Silicon microring resonator |
| 1st Author's Name | Sosuke Matsuura |
| 1st Author's Affiliation | Yokohama National University(Yokohama National Univ.) |
| 2nd Author's Name | Naoki Yamasaku |
| 2nd Author's Affiliation | Yokohama National University(Yokohama National Univ.) |
| 3rd Author's Name | Yasuo Kokubun |
| 3rd Author's Affiliation | Yokohama National University(Yokohama National Univ.) |
| 4th Author's Name | Yoshiaki Nishijima |
| 4th Author's Affiliation | Yokohama National University(Yokohama National Univ.) |
| 5th Author's Name | Shinji Okazaki |
| 5th Author's Affiliation | Yokohama National University(Yokohama National Univ.) |
| 6th Author's Name | Taro Arakawa |
| 6th Author's Affiliation | Yokohama National University(Yokohama National Univ.) |
| Date | 2017-08-31 |
| Paper # | R2017-29,EMD2017-23,CPM2017-44,OPE2017-53,LQE2017-26 |
| Volume (vol) | vol.117 |
| Number (no) | R-191,EMD-192,CPM-193,OPE-194,LQE-195 |
| Page | pp.pp.27-30(R), pp.27-30(EMD), pp.27-30(CPM), pp.27-30(OPE), pp.27-30(LQE), |
| #Pages | 4 |
| Date of Issue | 2017-08-24 (R, EMD, CPM, OPE, LQE) |