Presentation	2017-08-09 Improvement in the CO2 sensitivity of La2O3/SnO2-based sensors and their characteristics fabricated on micromachined hotplates Tatsuya Iwata, Kyosuke Matsuda, Kazuhiro Takahashi, Kazuaki Sawada,
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Abstract(in Japanese)	(See Japanese page)
Abstract(in English)
Keyword(in Japanese)	(See Japanese page)
Keyword(in English)
Paper #	ED2017-32
Date of Issue	2017-08-02 (ED)

Conference Information
Committee	ED
Conference Date	2017/8/9(2days)
Place (in Japanese)	(See Japanese page)
Place (in English)	Kikai-Shinko-Kaikan Bldg.
Topics (in Japanese)	(See Japanese page)
Topics (in English)	Sensor, MEMS, general
Chair	Kunio Tsuda(Toshiba)
Vice Chair	Michihiko Suhara(TMU)
Secretary	Michihiko Suhara(New JRC)
Assistant	Toshiyuki Oishi(Saga Univ.) / Tatsuya Iwata(TUT)

Paper Information
Registration To	Technical Committee on Electron Devices
Language	JPN
Title (in Japanese)	(See Japanese page)
Sub Title (in Japanese)	(See Japanese page)
Title (in English)	Improvement in the CO2 sensitivity of La2O3/SnO2-based sensors and their characteristics fabricated on micromachined hotplates
Sub Title (in English)
Keyword(1)
1st Author's Name	Tatsuya Iwata
1st Author's Affiliation	Toyohashi University of Technology(Toyohashi Univ. of Tech.)
2nd Author's Name	Kyosuke Matsuda
2nd Author's Affiliation	Toyohashi University of Technology(Toyohashi Univ. of Tech.)
3rd Author's Name	Kazuhiro Takahashi
3rd Author's Affiliation	Toyohashi University of Technology(Toyohashi Univ. of Tech.)
4th Author's Name	Kazuaki Sawada
4th Author's Affiliation	Toyohashi University of Technology(Toyohashi Univ. of Tech.)
Date	2017-08-09
Paper #	ED2017-32
Volume (vol)	vol.117
Number (no)	ED-172
Page	pp.pp.29-32(ED),
#Pages	4
Date of Issue	2017-08-02 (ED)