| Presentation | 2017-07-22 Monomolecular layer growth control of ZnO films by pulse supply of a metal source gas in catalytic reaction-assisted chemical vapor deposition Tarou Saito, Shotarou Ono, Ryuta Iba, Kanji Yasui, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | |
| Paper # | CPM2017-32 |
| Date of Issue | 2017-07-14 (CPM) |
| Conference Information | |
| Committee | CPM |
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| Conference Date | 2017/7/21(2days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | Fumihiko Hirose(Yamagata Univ.) |
| Vice Chair | Mayumi Takeyama(Kitami Inst. of Tech.) |
| Secretary | Mayumi Takeyama(Nihon Univ.) |
| Assistant | Yuichi Akage(NTT) |
| Paper Information | |
| Registration To | Technical Committee on Component Parts and Materials |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Monomolecular layer growth control of ZnO films by pulse supply of a metal source gas in catalytic reaction-assisted chemical vapor deposition |
| Sub Title (in English) | |
| Keyword(1) | |
| 1st Author's Name | Tarou Saito |
| 1st Author's Affiliation | Nagaoka Universty of Technology(Nagaoka Univ. of Tech.) |
| 2nd Author's Name | Shotarou Ono |
| 2nd Author's Affiliation | Nagaoka Universty of Technology(Nagaoka Univ. of Tech.) |
| 3rd Author's Name | Ryuta Iba |
| 3rd Author's Affiliation | Nagaoka Universty of Technology(Nagaoka Univ. of Tech.) |
| 4th Author's Name | Kanji Yasui |
| 4th Author's Affiliation | Nagaoka Universty of Technology(Nagaoka Univ. of Tech.) |
| Date | 2017-07-22 |
| Paper # | CPM2017-32 |
| Volume (vol) | vol.117 |
| Number (no) | CPM-148 |
| Page | pp.pp.57-60(CPM), |
| #Pages | 4 |
| Date of Issue | 2017-07-14 (CPM) |