| Presentation | 2017-06-20 Low-Carrier-Density Sputtered-MoS2 Film by Vapor-Phase- Sulfurization Kentaro Matsuura, Takumi Ohashi, Iriya Muneta, Seiya Ishihara, Kuniyuki Kakushima, Kazuo Tsutsui, Atsushi Ogura, Hitoshi Wakabayashi, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | |
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| Date of Issue |
| Conference Information | |
| Committee | SDM |
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| Conference Date | 2017/6/20(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Campus Innovation Center Tokyo |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | Material Science and Process Technology for MOS Devices and Memories |
| Chair | Tatsuya Kunikiyo(Renesas) |
| Vice Chair | Takahiro Shinada(Tohoku Univ.) |
| Secretary | Takahiro Shinada(Tohoku Univ.) |
| Assistant | Hiroya Ikeda(Shizuoka Univ.) |
| Paper Information | |
| Registration To | Technical Committee on Silicon Device and Materials |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Low-Carrier-Density Sputtered-MoS2 Film by Vapor-Phase- Sulfurization |
| Sub Title (in English) | |
| Keyword(1) | |
| 1st Author's Name | Kentaro Matsuura |
| 1st Author's Affiliation | Tokyo Institute of Technology(Tokyo Tech) |
| 2nd Author's Name | Takumi Ohashi |
| 2nd Author's Affiliation | Tokyo Institute of Technology(Tokyo Tech) |
| 3rd Author's Name | Iriya Muneta |
| 3rd Author's Affiliation | Tokyo Institute of Technology(Tokyo Tech) |
| 4th Author's Name | Seiya Ishihara |
| 4th Author's Affiliation | Meiji University(Meiji Univ.) |
| 5th Author's Name | Kuniyuki Kakushima |
| 5th Author's Affiliation | Tokyo Institute of Technology(Tokyo Tech) |
| 6th Author's Name | Kazuo Tsutsui |
| 6th Author's Affiliation | Tokyo Institute of Technology(Tokyo Tech) |
| 7th Author's Name | Atsushi Ogura |
| 7th Author's Affiliation | Meiji University(Meiji Univ.) |
| 8th Author's Name | Hitoshi Wakabayashi |
| 8th Author's Affiliation | Tokyo Institute of Technology(Tokyo Tech) |
| Date | 2017-06-20 |
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| Volume (vol) | vol.117 |
| Number (no) | SDM-101 |
| Page | pp.pp.-(), |
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