| Presentation | 2017-06-20 [Invited Lecture] Development of Quantum Imaging Detector using SOI Technology Yasuo Arai, |
|---|---|
| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Silicon is a good material for detecting quantum beam (Photon, X-ray, Gamma-ray, Electron, Ion, Neutron etc.) and also good for implementing electronics. Then combining these functions in a single chip is sought but it was difficult to realize in standard bulk CMOS technology. We have developed monolithic radiation image sensors using Silicon-On-Insulator (SOI) technology. This enables smaller pixel size than existing detector and in-pixel data processing, thus opened new detection method. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | SOI / radiation / imaging / X-ray / quantum beam / CMOS / detector |
| Paper # | SDM2017-22 |
| Date of Issue | 2017-06-13 (SDM) |
| Conference Information | |
| Committee | SDM |
|---|---|
| Conference Date | 2017/6/20(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Campus Innovation Center Tokyo |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | Material Science and Process Technology for MOS Devices and Memories |
| Chair | Tatsuya Kunikiyo(Renesas) |
| Vice Chair | Takahiro Shinada(Tohoku Univ.) |
| Secretary | Takahiro Shinada(Tohoku Univ.) |
| Assistant | Hiroya Ikeda(Shizuoka Univ.) |
| Paper Information | |
| Registration To | Technical Committee on Silicon Device and Materials |
|---|---|
| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | [Invited Lecture] Development of Quantum Imaging Detector using SOI Technology |
| Sub Title (in English) | Looking Elementary Particles and X-rays with Semiconductor |
| Keyword(1) | SOI |
| Keyword(2) | radiation |
| Keyword(3) | imaging |
| Keyword(4) | X-ray |
| Keyword(5) | quantum beam |
| Keyword(6) | CMOS |
| Keyword(7) | detector |
| 1st Author's Name | Yasuo Arai |
| 1st Author's Affiliation | High Energy Accelerator Research Organization(KEK) |
| Date | 2017-06-20 |
| Paper # | SDM2017-22 |
| Volume (vol) | vol.117 |
| Number (no) | SDM-101 |
| Page | pp.pp.5-8(SDM), |
| #Pages | 4 |
| Date of Issue | 2017-06-13 (SDM) |