Presentation 2017-05-19
Analysis of High-frequency Signal Loss for Interconnecting Pads on the Si Substrate
Yoshito Kato, Daichi Ichikawa, Hao San, Tsugumichi Shibata,
PDF Download Page PDF download Page Link
Abstract(in Japanese) (See Japanese page)
Abstract(in English) The mechanism of the generation of high-frequency loss depending on the conductivity of Si substrate in the integrated circuit structure is investigated. Specifically, frequency characteristics of the loss at the substrate underneath the electrode pad structure were analyzed using electromagnetic field simulations and compared with the results by the equivalent circuit model presented in a previous study. Increase in loss due to the relaxation of the interfacial polarization of the substrate layers coincides with the result predicted from the equivalent circuit model, which verifies the validity of the equivalent circuit. On the other hand, it is found that the influence of the skin effect, which is not included in the equivalent circuit, may be remarkable in a high-frequency region exceeding 10 GHz in some cases.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) Si Substrate / Integrated Circuit / High-frequency Loss / Electromagnetic Simulation / Equivalent Circuit Model
Paper # EST2017-1
Date of Issue 2017-05-12 (EST)

Conference Information
Committee EST
Conference Date 2017/5/19(1days)
Place (in Japanese) (See Japanese page)
Place (in English) Tohoku University Tokyo Branch
Topics (in Japanese) (See Japanese page)
Topics (in English) Simulation technology, etc.
Chair Hideaki Kimura(NTT)
Vice Chair Akimasa Hirata(Nagoya Inst. of Tech.) / Shinichiro Ohnuki(Nihon Univ.)
Secretary Akimasa Hirata(Muroran Inst. of Tech.) / Shinichiro Ohnuki(Tohoku Univ.)
Assistant Atsushi Kezuka(ENRI) / Kenji Taguchi(Kitami Inst. of Tech.)

Paper Information
Registration To Technical Committee on Electronics Simulation Technology
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Analysis of High-frequency Signal Loss for Interconnecting Pads on the Si Substrate
Sub Title (in English)
Keyword(1) Si Substrate
Keyword(2) Integrated Circuit
Keyword(3) High-frequency Loss
Keyword(4) Electromagnetic Simulation
Keyword(5) Equivalent Circuit Model
1st Author's Name Yoshito Kato
1st Author's Affiliation Tokyo City University(TCU)
2nd Author's Name Daichi Ichikawa
2nd Author's Affiliation Tokyo City University(TCU)
3rd Author's Name Hao San
3rd Author's Affiliation Tokyo City University(TCU)
4th Author's Name Tsugumichi Shibata
4th Author's Affiliation Tokyo City University(TCU)
Date 2017-05-19
Paper # EST2017-1
Volume (vol) vol.117
Number (no) EST-37
Page pp.pp.1-4(EST),
#Pages 4
Date of Issue 2017-05-12 (EST)