| Presentation | 2017-04-21 Thermal-Plasma-Jet Crystallization of Amorphous Silicon Films on Flexible Glass Substrate Using Rotation Stage Wataru Nakano, Tatsuki Hieda, Hiroaki Hanafusa, Seiichiro Higashi, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | |
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| Conference Information | |
| Committee | OME / SDM |
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| Conference Date | 2017/4/20(2days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Tatsugochou Shougaigakushuu Center |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | Organic molecular devices, silicon device, biotechnology, thin film device, novel material, evaluation method, etc |
| Chair | Naoki Matsuda(AIST) / Tatsuya Kunikiyo(Renesas) |
| Vice Chair | Tatsuo Mori(Aichi Inst. of Tech.) / Takahiro Shinada(Tohoku Univ.) |
| Secretary | Tatsuo Mori(NTT) / Takahiro Shinada(Univ. of Tokyo) |
| Assistant | Hirotake Kajii(Osaka Univ.) / Dai Taguchi(Tokyo Inst. of Tech.) / Hiroya Ikeda(Shizuoka Univ.) |
| Paper Information | |
| Registration To | Technical Committee on Organic Molecular Electronics / Technical Committee on Silicon Device and Materials |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Thermal-Plasma-Jet Crystallization of Amorphous Silicon Films on Flexible Glass Substrate Using Rotation Stage |
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| 1st Author's Name | Wataru Nakano |
| 1st Author's Affiliation | Hiroshima University(Hiroshima Univ.) |
| 2nd Author's Name | Tatsuki Hieda |
| 2nd Author's Affiliation | Hiroshima University(Hiroshima Univ.) |
| 3rd Author's Name | Hiroaki Hanafusa |
| 3rd Author's Affiliation | Hiroshima University(Hiroshima Univ.) |
| 4th Author's Name | Seiichiro Higashi |
| 4th Author's Affiliation | Hiroshima University(Hiroshima Univ.) |
| Date | 2017-04-21 |
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| Volume (vol) | vol.117 |
| Number (no) | SDM-7,OME-8 |
| Page | pp.pp.-(), |
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