Presentation 2017-04-20
Fabrications of microfluidic structure and potential detection by organic nano-transistor for environmental and bio-sensors
Kazuhiro Kudo, Kohei Enda, Takuro Tawara, Hiroshi Yamauchi, Yugo Okada, Masatoshi Sakai,
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Abstract(in Japanese) (See Japanese page)
Abstract(in English) Recently, high sensitivity and selectivity sensor researches on the environmental and bio-sensors aiming at solving environmental pollution and phytotoxicity problems have been promoted. In this report, the fabrication method of microfluidic structure for the selection of molecules and potential detection using model molecules was estimated. Nano-porous alumina (Al2O3) was formed using a two-step anodizing oxidation process. Next, a microfabrication technique using photolithography and anisotropic Si etching was applied to fabricate tapered structure in Si substrate. Finally, nano-static induction transistors were fabricated and basic transistor operation was confirmed.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) Environmental Sensor / Biosensor / Microfluidic Structure / Organic Transistor / Porous Alumina / DNA
Paper # SDM2017-3,OME2017-3
Date of Issue 2017-04-13 (SDM, OME)

Conference Information
Committee OME / SDM
Conference Date 2017/4/20(2days)
Place (in Japanese) (See Japanese page)
Place (in English) Tatsugochou Shougaigakushuu Center
Topics (in Japanese) (See Japanese page)
Topics (in English) Organic molecular devices, silicon device, biotechnology, thin film device, novel material, evaluation method, etc
Chair Naoki Matsuda(AIST) / Tatsuya Kunikiyo(Renesas)
Vice Chair Tatsuo Mori(Aichi Inst. of Tech.) / Takahiro Shinada(Tohoku Univ.)
Secretary Tatsuo Mori(NTT) / Takahiro Shinada(Univ. of Tokyo)
Assistant Hirotake Kajii(Osaka Univ.) / Dai Taguchi(Tokyo Inst. of Tech.) / Hiroya Ikeda(Shizuoka Univ.)

Paper Information
Registration To Technical Committee on Organic Molecular Electronics / Technical Committee on Silicon Device and Materials
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Fabrications of microfluidic structure and potential detection by organic nano-transistor for environmental and bio-sensors
Sub Title (in English)
Keyword(1) Environmental Sensor
Keyword(2) Biosensor
Keyword(3) Microfluidic Structure
Keyword(4) Organic Transistor
Keyword(5) Porous Alumina
Keyword(6) DNA
1st Author's Name Kazuhiro Kudo
1st Author's Affiliation Chiba University(Chiba Univ.)
2nd Author's Name Kohei Enda
2nd Author's Affiliation Chiba University(Chiba Univ.)
3rd Author's Name Takuro Tawara
3rd Author's Affiliation Chiba University(Chiba Univ.)
4th Author's Name Hiroshi Yamauchi
4th Author's Affiliation Chiba University(Chiba Univ.)
5th Author's Name Yugo Okada
5th Author's Affiliation Chiba University(Chiba Univ.)
6th Author's Name Masatoshi Sakai
6th Author's Affiliation Chiba University(Chiba Univ.)
Date 2017-04-20
Paper # SDM2017-3,OME2017-3
Volume (vol) vol.117
Number (no) SDM-7,OME-8
Page pp.pp.9-14(SDM), pp.9-14(OME),
#Pages 6
Date of Issue 2017-04-13 (SDM, OME)