| Presentation | 2017-04-20 [Invited Talk] Study on Nano-Dot Structure Permanent Memory Tsuyoshi Watanabe, Noriyuki Miura, Shijia Liu, Shigeki Imai, Makoto Nagata, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We propose a permanent digital memory system in which data is saved by a presence of metal nano-dot at interconnects of word line and bit line. The data is retrieved by mutual capacitance difference due to the nano-dot presence. A test chip is prepared by 0.18μm CMOS process. Its read-out properties have over 1000-years durability which is verified by aging acceleration test. It is shown that an areal density of memory can be increased up to 1.3Tbit/in2 by miniaturization of nano-dots and word/bit lines using EB lithography and nanoimprint lithography. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Permanent memory / nano-dot / EB lithography / Nanoimprint lithography |
| Paper # | ICD2017-4 |
| Date of Issue | 2017-04-13 (ICD) |
| Conference Information | |
| Committee | ICD |
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| Conference Date | 2017/4/20(2days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | Minoru Fujishima(Hiroshima Univ.) |
| Vice Chair | Hideto Hidaka(Renesas) |
| Secretary | Hideto Hidaka(Hiroshima Univ.) |
| Assistant | Takashi Hashimoto(Panasonic) / Masanori Natsui(Tohoku Univ.) / Hiroyuki Ito(Tokyo Inst. of Tech.) / Pham Konkuha(Univ. of Electro-Comm.) |
| Paper Information | |
| Registration To | Technical Committee on Integrated Circuits and Devices |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | [Invited Talk] Study on Nano-Dot Structure Permanent Memory |
| Sub Title (in English) | |
| Keyword(1) | Permanent memory |
| Keyword(2) | nano-dot |
| Keyword(3) | EB lithography |
| Keyword(4) | Nanoimprint lithography |
| 1st Author's Name | Tsuyoshi Watanabe |
| 1st Author's Affiliation | Kobe University(Kobe Univ.) |
| 2nd Author's Name | Noriyuki Miura |
| 2nd Author's Affiliation | Kobe University(Kobe Univ.) |
| 3rd Author's Name | Shijia Liu |
| 3rd Author's Affiliation | Kobe University(Kobe Univ.) |
| 4th Author's Name | Shigeki Imai |
| 4th Author's Affiliation | Kobe University(Kobe Univ.) |
| 5th Author's Name | Makoto Nagata |
| 5th Author's Affiliation | Kobe University(Kobe Univ.) |
| Date | 2017-04-20 |
| Paper # | ICD2017-4 |
| Volume (vol) | vol.117 |
| Number (no) | ICD-9 |
| Page | pp.pp.17-22(ICD), |
| #Pages | 6 |
| Date of Issue | 2017-04-13 (ICD) |