Presentation 2017-04-21
[Invited Lecture] Demonstration of HfO2-Based Ferroelectric Tunnel Junction (FTJ)
Marina Yamaguchi, Shosuke Fujii, Yuuichi Kamimuta, Tsunehiro Ino, Riichiro Takaishi, Yasushi Nakasaki, Masumi Saitoh,
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Abstract(in Japanese) (See Japanese page)
Abstract(in English) In recent years, two remarkable progresses have been made on ferroelectric materials and devices. One is the demonstration of ferroelectric tunnel junction (FTJ) which can readout the polarization states non-destructively. Another progress is the discovery of ferroelectricity of HfO2, the most common high-k material in advanced CMOS devices. By combining these progresses, novel ferroelectric HfO2-based tunnel junction, HfO2 FTJ, is expected to be achieved. We established a solid guideline for performance improvement and demonstrated, for the first time, successful operation of the HfO2 FTJ. And we found that HfO2 FTJ has several characteristics superior to those of the other emerging memories.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) Ferroelectric Tunnel Junction / FTJ / HfO2
Paper # ICD2017-16
Date of Issue 2017-04-13 (ICD)

Conference Information
Committee ICD
Conference Date 2017/4/20(2days)
Place (in Japanese) (See Japanese page)
Place (in English)
Topics (in Japanese) (See Japanese page)
Topics (in English)
Chair Minoru Fujishima(Hiroshima Univ.)
Vice Chair Hideto Hidaka(Renesas)
Secretary Hideto Hidaka(Hiroshima Univ.)
Assistant Takashi Hashimoto(Panasonic) / Masanori Natsui(Tohoku Univ.) / Hiroyuki Ito(Tokyo Inst. of Tech.) / Pham Konkuha(Univ. of Electro-Comm.)

Paper Information
Registration To Technical Committee on Integrated Circuits and Devices
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) [Invited Lecture] Demonstration of HfO2-Based Ferroelectric Tunnel Junction (FTJ)
Sub Title (in English)
Keyword(1) Ferroelectric Tunnel Junction
Keyword(2) FTJ
Keyword(3) HfO2
1st Author's Name Marina Yamaguchi
1st Author's Affiliation Toshiba Corporation(Toshiba)
2nd Author's Name Shosuke Fujii
2nd Author's Affiliation Toshiba Corporation(Toshiba)
3rd Author's Name Yuuichi Kamimuta
3rd Author's Affiliation Toshiba Corporation(Toshiba)
4th Author's Name Tsunehiro Ino
4th Author's Affiliation Toshiba Corporation(Toshiba)
5th Author's Name Riichiro Takaishi
5th Author's Affiliation Toshiba Corporation(Toshiba)
6th Author's Name Yasushi Nakasaki
6th Author's Affiliation Toshiba Corporation(Toshiba)
7th Author's Name Masumi Saitoh
7th Author's Affiliation Toshiba Corporation(Toshiba)
Date 2017-04-21
Paper # ICD2017-16
Volume (vol) vol.117
Number (no) ICD-9
Page pp.pp.85-88(ICD),
#Pages 4
Date of Issue 2017-04-13 (ICD)