| Presentation | 2017-04-20 [Invited Lecture] First demonstration of FinFET Split-Gate MONOS for High-Speed and Highly-Reliable Embedded Flash in 16/14nm-node and beyond Shibun Tsuda, Yoshiyuki Kawashima, Kenichiro Sonoda, Atsushi Yoshitomi, Tatsuyoshi Mihara, Shunichi Narumi, Masao Inoue, Seiji Muranaka, Takahiro Maruyama, Tomohiro Yamashita, Yasuo Yamaguchi, Digh Hisamoto, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | FinFET split-gate metal-oxide nitride oxide silicon (SG-MONOS) Flash memories have been fabricated and operated for the first time. Excellent subthreshold characteristics and small threshold-voltage variability owing to a Fin-structure are clarified. It is demonstrated that Fin top-corner effects are well suppressed by incremental step pulse programming for source side injection. Highly reliable data retention at 150 ºC after 250K program/erase cycles is confirmed for advanced automotive system applications. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | embedded Flash memory / split gate cell / MONOS / FinFET |
| Paper # | ICD2017-7 |
| Date of Issue | 2017-04-13 (ICD) |
| Conference Information | |
| Committee | ICD |
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| Conference Date | 2017/4/20(2days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | Minoru Fujishima(Hiroshima Univ.) |
| Vice Chair | Hideto Hidaka(Renesas) |
| Secretary | Hideto Hidaka(Hiroshima Univ.) |
| Assistant | Takashi Hashimoto(Panasonic) / Masanori Natsui(Tohoku Univ.) / Hiroyuki Ito(Tokyo Inst. of Tech.) / Pham Konkuha(Univ. of Electro-Comm.) |
| Paper Information | |
| Registration To | Technical Committee on Integrated Circuits and Devices |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | [Invited Lecture] First demonstration of FinFET Split-Gate MONOS for High-Speed and Highly-Reliable Embedded Flash in 16/14nm-node and beyond |
| Sub Title (in English) | |
| Keyword(1) | embedded Flash memory |
| Keyword(2) | split gate cell |
| Keyword(3) | MONOS |
| Keyword(4) | FinFET |
| 1st Author's Name | Shibun Tsuda |
| 1st Author's Affiliation | Renesas Electronics Corporation(Renesas Electronics) |
| 2nd Author's Name | Yoshiyuki Kawashima |
| 2nd Author's Affiliation | Renesas Electronics Corporation(Renesas Electronics) |
| 3rd Author's Name | Kenichiro Sonoda |
| 3rd Author's Affiliation | Renesas Electronics Corporation(Renesas Electronics) |
| 4th Author's Name | Atsushi Yoshitomi |
| 4th Author's Affiliation | Renesas Electronics Corporation(Renesas Electronics) |
| 5th Author's Name | Tatsuyoshi Mihara |
| 5th Author's Affiliation | Renesas Electronics Corporation(Renesas Electronics) |
| 6th Author's Name | Shunichi Narumi |
| 6th Author's Affiliation | Renesas Electronics Corporation(Renesas Electronics) |
| 7th Author's Name | Masao Inoue |
| 7th Author's Affiliation | Renesas Electronics Corporation(Renesas Electronics) |
| 8th Author's Name | Seiji Muranaka |
| 8th Author's Affiliation | Renesas Electronics Corporation(Renesas Electronics) |
| 9th Author's Name | Takahiro Maruyama |
| 9th Author's Affiliation | Renesas Electronics Corporation(Renesas Electronics) |
| 10th Author's Name | Tomohiro Yamashita |
| 10th Author's Affiliation | Renesas Electronics Corporation(Renesas Electronics) |
| 11th Author's Name | Yasuo Yamaguchi |
| 11th Author's Affiliation | Renesas Electronics Corporation(Renesas Electronics) |
| 12th Author's Name | Digh Hisamoto |
| 12th Author's Affiliation | Hitachi, Ltd(Hitachi) |
| Date | 2017-04-20 |
| Paper # | ICD2017-7 |
| Volume (vol) | vol.117 |
| Number (no) | ICD-9 |
| Page | pp.pp.35-38(ICD), |
| #Pages | 4 |
| Date of Issue | 2017-04-13 (ICD) |