Presentation 2017-01-26
[Invited Lecture] Current status and problems of epitaxial wafers for GaN electronic devices
Yohei Otoki,
PDF Download Page PDF download Page Link
Abstract(in Japanese) (See Japanese page)
Abstract(in English) GaN electronic devices have been in the practical stage mainly for high frequency applications. In epitaxial growth, the tolerance range of growth conditions is narrower than that of GaAs, and then very precise control is necessary. In addition, since there are point defects which become traps in the crystal, it is very important to know and control them. Recently, improvements of device performance such as Schottky characteristics, linearity, high breakdown voltage, by using a high quality GaN substrate have been reported. Use of the substrate is expected in the near future
Keyword(in Japanese) (See Japanese page)
Keyword(in English) GaN / epitaxial growth / HEMT / Eletronic Devices / MOCVD / GaN substrate / Device performance
Paper # ED2016-100,MW2016-176
Date of Issue 2017-01-19 (ED, MW)

Conference Information
Committee MW / ED
Conference Date 2017/1/26(2days)
Place (in Japanese) (See Japanese page)
Place (in English) Kikai-Shinko-Kaikan Bldg.
Topics (in Japanese) (See Japanese page)
Topics (in English) Compound Semiconductor IC and High-Speed, High-Frequency Devices / Microwave Technologies
Chair Yohei Ishikawa(Kyoto Univ.) / Koichi Maezawa(Univ. of Toyama)
Vice Chair Takao Kuki(Kokushikan Univ.) / Kenjiro Nishikawa(Kagoshima Univ.) / Kenichi Tajima(Mitsubishi Electric) / Kunio Tsuda(Toshiba)
Secretary Takao Kuki(Panasonic) / Kenjiro Nishikawa(Tokyo Inst. of Tech.) / Kenichi Tajima(JAIST) / Kunio Tsuda(New JRC)
Assistant Naoto Sekiya(Univ. of Yamanashi) / Satoshi Ono(Univ. of Electro-Comm.) / Masataka Higashiwaki(NICT) / Toshiyuki Oishi(Saga Univ.)

Paper Information
Registration To Technical Committee on Microwaves / Technical Committee on Electron Devices
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) [Invited Lecture] Current status and problems of epitaxial wafers for GaN electronic devices
Sub Title (in English)
Keyword(1) GaN
Keyword(2) epitaxial growth
Keyword(3) HEMT
Keyword(4) Eletronic Devices
Keyword(5) MOCVD
Keyword(6) GaN substrate
Keyword(7) Device performance
1st Author's Name Yohei Otoki
1st Author's Affiliation SCIOCS(SCIOCS)
Date 2017-01-26
Paper # ED2016-100,MW2016-176
Volume (vol) vol.116
Number (no) ED-431,MW-432
Page pp.pp.19-22(ED), pp.19-22(MW),
#Pages 4
Date of Issue 2017-01-19 (ED, MW)