Presentation 2016-12-12
Reduced Current Collapse in AlGaN/GaN HEMTs with a 3-Dimensional Field Plate
Suzuki Atsuya, Joel Asubar, Tokuda Hirokuni, Kuzuhara Masaaki,
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Abstract(in Japanese) (See Japanese page)
Abstract(in English) We have fabricated a novel AlGaN/GaN HEMT with a multi-grooved and fin-shaped gate field-plate (G-FP), and studied its effect on the current collapse. Compared to the conventional gate FP device, the novel HEMT with a 3-dimensional FP (3DFP) structure exhibited a minimum increase in the dynamic on-resistance, demonstrating that an almost perfect collapse-free operation was achieved with a normalized dynamic on-resistance of less than 1.1. The results of groove depth dependence indicated that the current collapse in 3DFP HEMTs was most effectively suppressed when the groove depth was adjusted so that the bottom of the 3DFP electrode was aligned with the depth of 2-dimensional electron gas (2DEG) in a GaN channel.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) AlGaN/GaN HEMT / Current Collapse / 3DFP
Paper # ED2016-65,CPM2016-98,LQE2016-81
Date of Issue 2016-12-05 (ED, CPM, LQE)

Conference Information
Committee CPM / LQE / ED
Conference Date 2016/12/12(2days)
Place (in Japanese) (See Japanese page)
Place (in English) Kyoto University
Topics (in Japanese) (See Japanese page)
Topics (in English) Nitride semiconductors, optoelectronic devices, and related materials
Chair Satoru Noge(Numazu National College of Tech.) / Susumu Noda(Kyoto Univ.) / Koichi Maezawa(Univ. of Toyama)
Vice Chair Fumihiko Hirose(Yamagata Univ.) / Tsuyoshi Yamamoto(Fujitsu Labs.) / Kunio Tsuda(Toshiba)
Secretary Fumihiko Hirose(NTT) / Tsuyoshi Yamamoto(Nihon Univ.) / Kunio Tsuda(NTT)
Assistant Takashi Sakamoto(NTT) / Yuichi Nakamura(Toyohashi Univ. of Tech.) / / Masataka Higashiwaki(NICT) / Toshiyuki Oishi(Saga Univ.)

Paper Information
Registration To Technical Committee on Component Parts and Materials / Technical Committee on Lasers and Quantum Electronics / Technical Committee on Electron Devices
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Reduced Current Collapse in AlGaN/GaN HEMTs with a 3-Dimensional Field Plate
Sub Title (in English)
Keyword(1) AlGaN/GaN HEMT
Keyword(2) Current Collapse
Keyword(3) 3DFP
1st Author's Name Suzuki Atsuya
1st Author's Affiliation University of Fukui(Univ. Fukui)
2nd Author's Name Joel Asubar
2nd Author's Affiliation University of Fukui(Univ. Fukui)
3rd Author's Name Tokuda Hirokuni
3rd Author's Affiliation University of Fukui(Univ. Fukui)
4th Author's Name Kuzuhara Masaaki
4th Author's Affiliation University of Fukui(Univ. Fukui)
Date 2016-12-12
Paper # ED2016-65,CPM2016-98,LQE2016-81
Volume (vol) vol.116
Number (no) ED-356,CPM-357,LQE-358
Page pp.pp.41-44(ED), pp.41-44(CPM), pp.41-44(LQE),
#Pages 4
Date of Issue 2016-12-05 (ED, CPM, LQE)