Presentation 2016-12-12
Effect of Surface Treatment in Au/Ni Schottky Diodes Formed on Cleaved m-Plane Surfaces of Free-Standing n-GaN Sub-strates
Kenji Shiojima, Moe Naganawa, Tomoyoshi Mishima,
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Abstract(in Japanese) (See Japanese page)
Abstract(in English) We fabricated and characterized Au/Ni Schottky contacts on cleaved m-plane free-standing n-GaN surfaces (i) without any surface treatment, (ii) with H2O2 treatment, or (iii) with HCl treatment. The as-cleaved samples showed I-V characteristics with small n-values and less diode-to-diode variation. However, the H2O2 samples had much smaller Schottky barrier height. Whereas the HCl samples exhibited significantly large diode-to-diode variation. It is confirmed that cleaving without any surface treatment can provide a cleaner surface to form Schottky diodes on m-plane n-GaN surfaces than that with conventional HCl treatment.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) m-plane GaN / cleaving / surface treatment / Schottky contact
Paper # ED2016-60,CPM2016-93,LQE2016-76
Date of Issue 2016-12-05 (ED, CPM, LQE)

Conference Information
Committee CPM / LQE / ED
Conference Date 2016/12/12(2days)
Place (in Japanese) (See Japanese page)
Place (in English) Kyoto University
Topics (in Japanese) (See Japanese page)
Topics (in English) Nitride semiconductors, optoelectronic devices, and related materials
Chair Satoru Noge(Numazu National College of Tech.) / Susumu Noda(Kyoto Univ.) / Koichi Maezawa(Univ. of Toyama)
Vice Chair Fumihiko Hirose(Yamagata Univ.) / Tsuyoshi Yamamoto(Fujitsu Labs.) / Kunio Tsuda(Toshiba)
Secretary Fumihiko Hirose(NTT) / Tsuyoshi Yamamoto(Nihon Univ.) / Kunio Tsuda(NTT)
Assistant Takashi Sakamoto(NTT) / Yuichi Nakamura(Toyohashi Univ. of Tech.) / / Masataka Higashiwaki(NICT) / Toshiyuki Oishi(Saga Univ.)

Paper Information
Registration To Technical Committee on Component Parts and Materials / Technical Committee on Lasers and Quantum Electronics / Technical Committee on Electron Devices
Language ENG-JTITLE
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Effect of Surface Treatment in Au/Ni Schottky Diodes Formed on Cleaved m-Plane Surfaces of Free-Standing n-GaN Sub-strates
Sub Title (in English) *
Keyword(1) m-plane GaN
Keyword(2) cleaving
Keyword(3) surface treatment
Keyword(4) Schottky contact
1st Author's Name Kenji Shiojima
1st Author's Affiliation University of Fukui(Univ. of Fukui)
2nd Author's Name Moe Naganawa
2nd Author's Affiliation University of Fukui(Univ. of Fukui)
3rd Author's Name Tomoyoshi Mishima
3rd Author's Affiliation Hosei University(Hosei Univ.)
Date 2016-12-12
Paper # ED2016-60,CPM2016-93,LQE2016-76
Volume (vol) vol.116
Number (no) ED-356,CPM-357,LQE-358
Page pp.pp.15-20(ED), pp.15-20(CPM), pp.15-20(LQE),
#Pages 6
Date of Issue 2016-12-05 (ED, CPM, LQE)