Presentation | 2016-12-12 Thermodynamic Study on Crystallization of Group-IV Amorphous Thin Film by Flash Lamp Annealing Naoto Matsuo, Naoki Yosioka, Akira Heya, Yosiaki Nakamura, Takehiko Yokomori, Masaki Yosioka, |
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PDF Download Page | PDF download Page Link |
Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | |
Paper # | EID2016-20,SDM2016-101 |
Date of Issue | 2016-12-05 (EID, SDM) |
Conference Information | |
Committee | SDM / EID |
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Conference Date | 2016/12/12(1days) |
Place (in Japanese) | (See Japanese page) |
Place (in English) | NAIST |
Topics (in Japanese) | (See Japanese page) |
Topics (in English) | Fabrication and Evaluation of Silicon Related Materials |
Chair | Tatsuya Kunikiyo(Renesas) / Tomokazu Shiga(Univ. of Electro-Comm.) |
Vice Chair | Takahiro Shinada(Tohoku Univ.) / Mutsumi Kimura(Ryukoku Univ.) / Yuko Kominami(Shizuoka Univ.) |
Secretary | Takahiro Shinada(Tohoku Univ.) / Mutsumi Kimura(Renesas) / Yuko Kominami(NTT) |
Assistant | Hiroya Ikeda(Shizuoka Univ.) / Rumiko Yamaguchi(Akita Univ.) / Hiroyuki Nitta(Japan Display) / Mitsuru Nakata(NHK) / Takashi Kojiri(ZEON) / Ryosuke Nonaka(Toshiba) |
Paper Information | |
Registration To | Technical Committee on Silicon Device and Materials / Technical Committee on Electronic Information Displays |
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Language | JPN |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | Thermodynamic Study on Crystallization of Group-IV Amorphous Thin Film by Flash Lamp Annealing |
Sub Title (in English) | |
Keyword(1) | |
1st Author's Name | Naoto Matsuo |
1st Author's Affiliation | University of Hyogo(Univ Hyogo) |
2nd Author's Name | Naoki Yosioka |
2nd Author's Affiliation | University of Hyogo(Univ Hyogo) |
3rd Author's Name | Akira Heya |
3rd Author's Affiliation | University of Hyogo(Univ Hyogo) |
4th Author's Name | Yosiaki Nakamura |
4th Author's Affiliation | USHIO Incorporation(USIO INK.) |
5th Author's Name | Takehiko Yokomori |
5th Author's Affiliation | USHIO Incorporation(USIO INK.) |
6th Author's Name | Masaki Yosioka |
6th Author's Affiliation | USHIO Incorporation(USIO INK.) |
Date | 2016-12-12 |
Paper # | EID2016-20,SDM2016-101 |
Volume (vol) | vol.116 |
Number (no) | EID-354,SDM-355 |
Page | pp.pp.49-54(EID), pp.49-54(SDM), |
#Pages | 6 |
Date of Issue | 2016-12-05 (EID, SDM) |