Presentation 2016-12-12
Thermodynamic Study on Crystallization of Group-IV Amorphous Thin Film by Flash Lamp Annealing
Naoto Matsuo, Naoki Yosioka, Akira Heya, Yosiaki Nakamura, Takehiko Yokomori, Masaki Yosioka,
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Abstract(in Japanese) (See Japanese page)
Abstract(in English)
Keyword(in Japanese) (See Japanese page)
Keyword(in English)
Paper # EID2016-20,SDM2016-101
Date of Issue 2016-12-05 (EID, SDM)

Conference Information
Committee SDM / EID
Conference Date 2016/12/12(1days)
Place (in Japanese) (See Japanese page)
Place (in English) NAIST
Topics (in Japanese) (See Japanese page)
Topics (in English) Fabrication and Evaluation of Silicon Related Materials
Chair Tatsuya Kunikiyo(Renesas) / Tomokazu Shiga(Univ. of Electro-Comm.)
Vice Chair Takahiro Shinada(Tohoku Univ.) / Mutsumi Kimura(Ryukoku Univ.) / Yuko Kominami(Shizuoka Univ.)
Secretary Takahiro Shinada(Tohoku Univ.) / Mutsumi Kimura(Renesas) / Yuko Kominami(NTT)
Assistant Hiroya Ikeda(Shizuoka Univ.) / Rumiko Yamaguchi(Akita Univ.) / Hiroyuki Nitta(Japan Display) / Mitsuru Nakata(NHK) / Takashi Kojiri(ZEON) / Ryosuke Nonaka(Toshiba)

Paper Information
Registration To Technical Committee on Silicon Device and Materials / Technical Committee on Electronic Information Displays
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Thermodynamic Study on Crystallization of Group-IV Amorphous Thin Film by Flash Lamp Annealing
Sub Title (in English)
Keyword(1)
1st Author's Name Naoto Matsuo
1st Author's Affiliation University of Hyogo(Univ Hyogo)
2nd Author's Name Naoki Yosioka
2nd Author's Affiliation University of Hyogo(Univ Hyogo)
3rd Author's Name Akira Heya
3rd Author's Affiliation University of Hyogo(Univ Hyogo)
4th Author's Name Yosiaki Nakamura
4th Author's Affiliation USHIO Incorporation(USIO INK.)
5th Author's Name Takehiko Yokomori
5th Author's Affiliation USHIO Incorporation(USIO INK.)
6th Author's Name Masaki Yosioka
6th Author's Affiliation USHIO Incorporation(USIO INK.)
Date 2016-12-12
Paper # EID2016-20,SDM2016-101
Volume (vol) vol.116
Number (no) EID-354,SDM-355
Page pp.pp.49-54(EID), pp.49-54(SDM),
#Pages 6
Date of Issue 2016-12-05 (EID, SDM)