| Presentation | 2016-12-09 Sputter-deposition of inclined anisotropy film with Co/Pt atomic layer stacking Naoki Honda, Shintaro Hinata, Shin Saito, |
|---|---|
| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Deposition of weakly inclined anisotropy film for bit-patterned media was studied. First, deposition of Co/Pt layer stacking film with high perpendicular anisotropy and saturation magnetization was investigated by room temperature co-sputtering of Co and Pt with rotating substrate holder. A film with a high perpendicular anisotropy of 1×107 erg/cm3 and saturation magnetization of 600 emu/cm3 was obtained when a high deposition Ar pressure of 4.8 Pa and 3 mono-layer stacking of Co and 2 mono-layer stacking of Pt were adopted. The obtained Co/Pt film was applied to deposit inclined anisotropy film using tilted collimator sputtering. Inclination of anisotropy axis of around 8˚ with a high perpendicular coercivity of around 5 kOe was obtained. The result suggested possibility to make a bit-patterned media for high recording densities. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Co/Pt layer stacking film / Sputter-deposition with rotating substrate holder / High Ar pressure deposition / Stacking layer thickness dependence / High magnetic anisotropy film / Inclined anisotropy film |
| Paper # | MR2016-38 |
| Date of Issue | 2016-12-01 (MR) |
| Conference Information | |
| Committee | MR / ITE-MMS |
|---|---|
| Conference Date | 2016/12/8(2days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Ehime Univ. |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | Signal Processing, etc. |
| Chair | Yoshihiro Okamoto(Ehime Univ.) / Eiichi Miyashita(NHK) |
| Vice Chair | |
| Secretary | (Kogakuin Univ.) / (AIST) |
| Assistant | Kiwamu Kudo(Toshiba) / Shuhei Yoshida(Kinki Univ.) |
| Paper Information | |
| Registration To | Technical Committee on Magnetic Recording / Technical Group on Multi-media Storage |
|---|---|
| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Sputter-deposition of inclined anisotropy film with Co/Pt atomic layer stacking |
| Sub Title (in English) | |
| Keyword(1) | Co/Pt layer stacking film |
| Keyword(2) | Sputter-deposition with rotating substrate holder |
| Keyword(3) | High Ar pressure deposition |
| Keyword(4) | Stacking layer thickness dependence |
| Keyword(5) | High magnetic anisotropy film |
| Keyword(6) | Inclined anisotropy film |
| 1st Author's Name | Naoki Honda |
| 1st Author's Affiliation | Tohoku Institute of Technology(Tohoku Inst. Tech.) |
| 2nd Author's Name | Shintaro Hinata |
| 2nd Author's Affiliation | Tohoku University(Tohoku Univ.) |
| 3rd Author's Name | Shin Saito |
| 3rd Author's Affiliation | Tohoku University(Tohoku Univ.) |
| Date | 2016-12-09 |
| Paper # | MR2016-38 |
| Volume (vol) | vol.116 |
| Number (no) | MR-348 |
| Page | pp.pp.51-56(MR), |
| #Pages | 6 |
| Date of Issue | 2016-12-01 (MR) |