| Presentation | 2016-11-18 Heat-resistance Evaluation of Si Doped DLC Films Ryo Nakazawa, Noriaki Ikenaga, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | |
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| Conference Information | |
| Committee | CPM |
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| Conference Date | 2016/11/18(2days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | Satoru Noge(Numazu National College of Tech.) |
| Vice Chair | Fumihiko Hirose(Yamagata Univ.) |
| Secretary | Fumihiko Hirose(NTT) |
| Assistant | Takashi Sakamoto(NTT) / Yuichi Nakamura(Toyohashi Univ. of Tech.) |
| Paper Information | |
| Registration To | Technical Committee on Component Parts and Materials |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Heat-resistance Evaluation of Si Doped DLC Films |
| Sub Title (in English) | |
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| 1st Author's Name | Ryo Nakazawa |
| 1st Author's Affiliation | Kanazawa Institute of Technology(Kanazawa Inst. Tech.) |
| 2nd Author's Name | Noriaki Ikenaga |
| 2nd Author's Affiliation | Kanazawa Institute of Technology(Kanazawa Inst. Tech.) |
| Date | 2016-11-18 |
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| Volume (vol) | vol.116 |
| Number (no) | CPM-311 |
| Page | pp.pp.-(), |
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