| Presentation | 2016-11-19 Barrier properties of TiHfN alloy film applicable to Cu plug Masaru Sato, Eiji Aoyagi, Atsushi Noya, Mayumi B. takeyama, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | |
| Paper # | CPM2016-70 |
| Date of Issue | 2016-11-11 (CPM) |
| Conference Information | |
| Committee | CPM |
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| Conference Date | 2016/11/18(2days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | Satoru Noge(Numazu National College of Tech.) |
| Vice Chair | Fumihiko Hirose(Yamagata Univ.) |
| Secretary | Fumihiko Hirose(NTT) |
| Assistant | Takashi Sakamoto(NTT) / Yuichi Nakamura(Toyohashi Univ. of Tech.) |
| Paper Information | |
| Registration To | Technical Committee on Component Parts and Materials |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Barrier properties of TiHfN alloy film applicable to Cu plug |
| Sub Title (in English) | |
| Keyword(1) | |
| 1st Author's Name | Masaru Sato |
| 1st Author's Affiliation | Kitami Institute of Technology(Kitami Inst. of Tech.) |
| 2nd Author's Name | Eiji Aoyagi |
| 2nd Author's Affiliation | Tohoku University(Tohoku Univ.) |
| 3rd Author's Name | Atsushi Noya |
| 3rd Author's Affiliation | Kitami Institute of Technology(Kitami Inst. of Tech.) |
| 4th Author's Name | Mayumi B. takeyama |
| 4th Author's Affiliation | Kitami Institute of Technology(Kitami Inst. of Tech.) |
| Date | 2016-11-19 |
| Paper # | CPM2016-70 |
| Volume (vol) | vol.116 |
| Number (no) | CPM-311 |
| Page | pp.pp.45-48(CPM), |
| #Pages | 4 |
| Date of Issue | 2016-11-11 (CPM) |