Presentation 2016-11-19
Cu(111) preferential orientation on TaWN ternary alloy barrier
Mayumi B. Takeyama, Masaru Sato,
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Abstract(in Japanese) (See Japanese page)
Abstract(in English) In this study, we examine that the Cu grain orientation control on the 5-nm-thick TaWN ternary alloy barrier. The strongly-preferential oriented Cu(111) layer is observed on thin TaWN barrier even in the as-deposited Cu(100 nm)/TaWN(5 nm)/Si system. Also, this system is tolerated annealing at 700 ̊C for 1 h without excess reaction and diffusion. It is revealed that the TaWN film is one of the excellent barrier having the thermal stability and low resistivity. Simultaneously, the TaWN film is candidate for superior underlayer to obtain the preferential orientation of Cu(111).
Keyword(in Japanese) (See Japanese page)
Keyword(in English) Cu plug / 2.5D-LSI / preferential orientation / TaWN / ternary alloy film
Paper # CPM2016-69
Date of Issue 2016-11-11 (CPM)

Conference Information
Committee CPM
Conference Date 2016/11/18(2days)
Place (in Japanese) (See Japanese page)
Place (in English)
Topics (in Japanese) (See Japanese page)
Topics (in English)
Chair Satoru Noge(Numazu National College of Tech.)
Vice Chair Fumihiko Hirose(Yamagata Univ.)
Secretary Fumihiko Hirose(NTT)
Assistant Takashi Sakamoto(NTT) / Yuichi Nakamura(Toyohashi Univ. of Tech.)

Paper Information
Registration To Technical Committee on Component Parts and Materials
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Cu(111) preferential orientation on TaWN ternary alloy barrier
Sub Title (in English)
Keyword(1) Cu plug
Keyword(2) 2.5D-LSI
Keyword(3) preferential orientation
Keyword(4) TaWN
Keyword(5) ternary alloy film
1st Author's Name Mayumi B. Takeyama
1st Author's Affiliation Kitami Institute of Technology(Kitami Inst. of Technol.)
2nd Author's Name Masaru Sato
2nd Author's Affiliation Kitami Institute of Technology(Kitami Inst. of Technol.)
Date 2016-11-19
Paper # CPM2016-69
Volume (vol) vol.116
Number (no) CPM-311
Page pp.pp.41-44(CPM),
#Pages 4
Date of Issue 2016-11-11 (CPM)