| Presentation | 2016-11-19 Cu(111) preferential orientation on TaWN ternary alloy barrier Mayumi B. Takeyama, Masaru Sato, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | In this study, we examine that the Cu grain orientation control on the 5-nm-thick TaWN ternary alloy barrier. The strongly-preferential oriented Cu(111) layer is observed on thin TaWN barrier even in the as-deposited Cu(100 nm)/TaWN(5 nm)/Si system. Also, this system is tolerated annealing at 700 ̊C for 1 h without excess reaction and diffusion. It is revealed that the TaWN film is one of the excellent barrier having the thermal stability and low resistivity. Simultaneously, the TaWN film is candidate for superior underlayer to obtain the preferential orientation of Cu(111). |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Cu plug / 2.5D-LSI / preferential orientation / TaWN / ternary alloy film |
| Paper # | CPM2016-69 |
| Date of Issue | 2016-11-11 (CPM) |
| Conference Information | |
| Committee | CPM |
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| Conference Date | 2016/11/18(2days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | Satoru Noge(Numazu National College of Tech.) |
| Vice Chair | Fumihiko Hirose(Yamagata Univ.) |
| Secretary | Fumihiko Hirose(NTT) |
| Assistant | Takashi Sakamoto(NTT) / Yuichi Nakamura(Toyohashi Univ. of Tech.) |
| Paper Information | |
| Registration To | Technical Committee on Component Parts and Materials |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Cu(111) preferential orientation on TaWN ternary alloy barrier |
| Sub Title (in English) | |
| Keyword(1) | Cu plug |
| Keyword(2) | 2.5D-LSI |
| Keyword(3) | preferential orientation |
| Keyword(4) | TaWN |
| Keyword(5) | ternary alloy film |
| 1st Author's Name | Mayumi B. Takeyama |
| 1st Author's Affiliation | Kitami Institute of Technology(Kitami Inst. of Technol.) |
| 2nd Author's Name | Masaru Sato |
| 2nd Author's Affiliation | Kitami Institute of Technology(Kitami Inst. of Technol.) |
| Date | 2016-11-19 |
| Paper # | CPM2016-69 |
| Volume (vol) | vol.116 |
| Number (no) | CPM-311 |
| Page | pp.pp.41-44(CPM), |
| #Pages | 4 |
| Date of Issue | 2016-11-11 (CPM) |