Presentation | 2016-11-19 Microwave activated chemical bath deposition of ZnO thin films Hiroaki Yoshiyachi, Yasushi Takano, |
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Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | Zinc oxide (ZnO) film has been deposited using chemical bath deposition (CBD).We compared ZnO fims deposited by microwave heating of the substrate and reaction mixture with ZnO films deposited using oil bath srirrer. The thin films were investigated by secondary electoron microscopy, SEM and x-ray diffraction, XRD measurement. We obtained ZnO thin films which have various morphology by using microwave. |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | zinc oxide / chemical bath deposition / II-VI compound semiconductor / Microwave |
Paper # | CPM2016-72 |
Date of Issue | 2016-11-11 (CPM) |
Conference Information | |
Committee | CPM |
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Conference Date | 2016/11/18(2days) |
Place (in Japanese) | (See Japanese page) |
Place (in English) | |
Topics (in Japanese) | (See Japanese page) |
Topics (in English) | |
Chair | Satoru Noge(Numazu National College of Tech.) |
Vice Chair | Fumihiko Hirose(Yamagata Univ.) |
Secretary | Fumihiko Hirose(NTT) |
Assistant | Takashi Sakamoto(NTT) / Yuichi Nakamura(Toyohashi Univ. of Tech.) |
Paper Information | |
Registration To | Technical Committee on Component Parts and Materials |
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Language | JPN |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | Microwave activated chemical bath deposition of ZnO thin films |
Sub Title (in English) | |
Keyword(1) | zinc oxide |
Keyword(2) | chemical bath deposition |
Keyword(3) | II-VI compound semiconductor |
Keyword(4) | Microwave |
1st Author's Name | Hiroaki Yoshiyachi |
1st Author's Affiliation | Shizuoka University(Shizuoka Univ.) |
2nd Author's Name | Yasushi Takano |
2nd Author's Affiliation | Shizuoka University(Shizuoka Univ.) |
Date | 2016-11-19 |
Paper # | CPM2016-72 |
Volume (vol) | vol.116 |
Number (no) | CPM-311 |
Page | pp.pp.55-58(CPM), |
#Pages | 4 |
Date of Issue | 2016-11-11 (CPM) |