| Presentation | 2016-08-08 Improvement of fabrication and characterization for embedded STJ Morita Kohei, Matsumoto Isao, Aoyagi Masahiro, Naruse Masato, Myoren Hiroaki, Taino Tohru, |
|---|---|
| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Superconducting tunnel junction (STJ) is a candidate next generation photon detector because of its high energy resolution. We have proposed and demonstrated an embedded STJ (e-STJ) using 3D integration technique for the photon detector with large detection area. Since the e-STJ is embedded in a Si substrate, it is difficult to realize the characteristics of low sub-gap current. To achieve good characteristics, we focused on the embedded hole. In the hole, there were some unevennesses on the sidewall of the hole. So we proposed a new fabrication method for the e-STJ. In the method, we use chlorobenzene at the fabrication process. The fabricated e-STJ showed reduction of the sub-gap current by new method. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Superconducting tunnel junction (STJ) / embedded STJ (e-STJ) |
| Paper # | SCE2016-13 |
| Date of Issue | 2016-08-01 (SCE) |
| Conference Information | |
| Committee | SCE |
|---|---|
| Conference Date | 2016/8/8(2days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Saitama Univ. (Omiya sonic city) |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | Nobuyuki Yoshikawa(Yokohama National Univ.) |
| Vice Chair | |
| Secretary | (National Defense Academy) |
| Assistant | Hiroyuki Akaike(Nagoya Univ.) / Yuki Yamanashi(Yokohama National Univ.) |
| Paper Information | |
| Registration To | Technical Committee on Superconductive Electronics |
|---|---|
| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Improvement of fabrication and characterization for embedded STJ |
| Sub Title (in English) | |
| Keyword(1) | Superconducting tunnel junction (STJ) |
| Keyword(2) | embedded STJ (e-STJ) |
| 1st Author's Name | Morita Kohei |
| 1st Author's Affiliation | Saitama University(Saitama Univ.) |
| 2nd Author's Name | Matsumoto Isao |
| 2nd Author's Affiliation | Saitama University(Saitama Univ.) |
| 3rd Author's Name | Aoyagi Masahiro |
| 3rd Author's Affiliation | National Institute of Advanced Industrial Science and Technology(AIST) |
| 4th Author's Name | Naruse Masato |
| 4th Author's Affiliation | Saitama University(Saitama Univ.) |
| 5th Author's Name | Myoren Hiroaki |
| 5th Author's Affiliation | Saitama University(Saitama Univ.) |
| 6th Author's Name | Taino Tohru |
| 6th Author's Affiliation | Saitama University(Saitama Univ.) |
| Date | 2016-08-08 |
| Paper # | SCE2016-13 |
| Volume (vol) | vol.116 |
| Number (no) | SCE-175 |
| Page | pp.pp.9-12(SCE), |
| #Pages | 4 |
| Date of Issue | 2016-08-01 (SCE) |