| Presentation | 2016-08-01 [Invited Talk] Novel Pixel Structure with Stacked Deep Photodiode to Achieve High NIR Sensitivity and High MTF Hiroki Takahashi, Hiroshi Tanaka, Masahiro Oda, Mitsuyoshi Ando, Naoto Niisoe, Shinichi Kawai, Takuya Asano, Mitsugu Yoshita, Tohru Yamada, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Novel pixel structure with Stacked Deep Photodiode (SDP) has been newly developed for both high Near Infra-Red (NIR) sensitivity and high Modulation Transfer Function (MTF). SDP with 5.4µm pixel pitch has achieved Quantum Efficiency (QE) of 30% and MTF of 40% at Nyquist frequency at 850nm wavelength by stacking photodiode completely separated from neighboring pixels. Furthermore, Shifted SDP which can be optimized for oblique incident light has suppressed crosstalk as low as 1.5% at 25 º at 850 nm wavelength. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | NIR / MTF / Stack / Image sensor / Crosstalk |
| Paper # | SDM2016-51,ICD2016-19 |
| Date of Issue | 2016-07-25 (SDM, ICD) |
| Conference Information | |
| Committee | ICD / SDM / ITE-IST |
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| Conference Date | 2016/8/1(3days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Central Electric Club |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | Analog, Mixed Analog and Digital, RF, and Sensor Interface, Low voltage/low power techniques, novel devices, circuits, and applications |
| Chair | Minoru Fujishima(Hiroshima Univ.) / Tatsuya Kunikiyo(Renesas) / Shigetoshi Sugawa(Tohoku Univ.) |
| Vice Chair | Hideto Hidaka(Renesas) / Takahiro Shinada(Tohoku Univ.) / Takayuki Hamamoto(東京理科大) / Hiroshi Ohtake(NHK) |
| Secretary | Hideto Hidaka(Hiroshima Univ.) / Takahiro Shinada(Univ. of Tokyo) / Takayuki Hamamoto(Tohoku Univ.) / Hiroshi Ohtake(Renesas) |
| Assistant | Takashi Hashimoto(Panasonic) / Masanori Natsui(Tohoku Univ.) / Hiroyuki Ito(Tokyo Inst. of Tech.) / Pham Konkuha(Univ. of Electro-Comm.) / Hiroya Ikeda(Shizuoka Univ.) |
| Paper Information | |
| Registration To | Technical Committee on Integrated Circuits and Devices / Technical Committee on Silicon Device and Materials / Technical Group on Information Sensing Technologies |
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| Language | ENG-JTITLE |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | [Invited Talk] Novel Pixel Structure with Stacked Deep Photodiode to Achieve High NIR Sensitivity and High MTF |
| Sub Title (in English) | |
| Keyword(1) | NIR |
| Keyword(2) | MTF |
| Keyword(3) | Stack |
| Keyword(4) | Image sensor |
| Keyword(5) | Crosstalk |
| 1st Author's Name | Hiroki Takahashi |
| 1st Author's Affiliation | TowerJazz Panasonic Semiconductor Co., Ltd.(TPSCo) |
| 2nd Author's Name | Hiroshi Tanaka |
| 2nd Author's Affiliation | TowerJazz Panasonic Semiconductor Co., Ltd.(TPSCo) |
| 3rd Author's Name | Masahiro Oda |
| 3rd Author's Affiliation | TowerJazz Panasonic Semiconductor Co., Ltd.(TPSCo) |
| 4th Author's Name | Mitsuyoshi Ando |
| 4th Author's Affiliation | TowerJazz Panasonic Semiconductor Co., Ltd.(TPSCo) |
| 5th Author's Name | Naoto Niisoe |
| 5th Author's Affiliation | TowerJazz Panasonic Semiconductor Co., Ltd.(TPSCo) |
| 6th Author's Name | Shinichi Kawai |
| 6th Author's Affiliation | Panasonic Semiconductor Solutions Co., Ltd.(PSCS) |
| 7th Author's Name | Takuya Asano |
| 7th Author's Affiliation | Panasonic Semiconductor Solutions Co., Ltd.(PSCS) |
| 8th Author's Name | Mitsugu Yoshita |
| 8th Author's Affiliation | Panasonic Semiconductor Solutions Co., Ltd.(PSCS) |
| 9th Author's Name | Tohru Yamada |
| 9th Author's Affiliation | Panasonic Semiconductor Solutions Co., Ltd.(PSCS) |
| Date | 2016-08-01 |
| Paper # | SDM2016-51,ICD2016-19 |
| Volume (vol) | vol.116 |
| Number (no) | SDM-172,ICD-173 |
| Page | pp.pp.41-44(SDM), pp.41-44(ICD), |
| #Pages | 4 |
| Date of Issue | 2016-07-25 (SDM, ICD) |