Presentation 2016-06-17
Fabrication of GaInAsP laser using directly bonded InP/Si
Tetsuo Nishiyama, Keiichi Matsumoto, Jyunya Kishikawa, Yuya Onuki, Naoki Kamada, Kazuhiko Shimomura,
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Abstract(in Japanese) (See Japanese page)
Abstract(in English) Integration technique of optical devices on silicon platform have been proposed. This technique uses direct bonded thin film InP and Si substrate, and follow the semiconductor crystal growth, the fabrication process of devices. In this report, we show the fabrication of GaInAsP double hetero laser, and its low-temperature lasing characteristics.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) InP / Si / direct wafer bonding / MOVPE / integration / optical device / semiconductor laser
Paper # OPE2016-12,LQE2016-22
Date of Issue 2016-06-10 (OPE, LQE)

Conference Information
Committee OPE / LQE
Conference Date 2016/6/17(1days)
Place (in Japanese) (See Japanese page)
Place (in English)
Topics (in Japanese) (See Japanese page)
Topics (in English)
Chair Kensuke Ogawa(Fujikura) / Susumu Noda(Kyoto Univ.)
Vice Chair Kazutoshi Kato(Kyushu Univ.) / Tsuyoshi Yamamoto(Fujitsu Labs.)
Secretary Kazutoshi Kato(Keio Univ.) / Tsuyoshi Yamamoto(Mitsubishi Electric)
Assistant Atsushi Aratake(NTT) / Katsumi Nakatsuhara(Kanagawa Inst. of Tech.)

Paper Information
Registration To Technical Committee on Optoelectronics / Technical Committee on Lasers and Quantum Electronics
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Fabrication of GaInAsP laser using directly bonded InP/Si
Sub Title (in English)
Keyword(1) InP
Keyword(2) Si
Keyword(3) direct wafer bonding
Keyword(4) MOVPE
Keyword(5) integration
Keyword(6) optical device
Keyword(7) semiconductor laser
1st Author's Name Tetsuo Nishiyama
1st Author's Affiliation Sophia University(Sophia Univ.)
2nd Author's Name Keiichi Matsumoto
2nd Author's Affiliation Sophia University(Sophia Univ.)
3rd Author's Name Jyunya Kishikawa
3rd Author's Affiliation Sophia University(Sophia Univ.)
4th Author's Name Yuya Onuki
4th Author's Affiliation Sophia University(Sophia Univ.)
5th Author's Name Naoki Kamada
5th Author's Affiliation Sophia University(Sophia Univ.)
6th Author's Name Kazuhiko Shimomura
6th Author's Affiliation Sophia University(Sophia Univ.)
Date 2016-06-17
Paper # OPE2016-12,LQE2016-22
Volume (vol) vol.116
Number (no) OPE-102,LQE-103
Page pp.pp.15-20(OPE), pp.15-20(LQE),
#Pages 6
Date of Issue 2016-06-10 (OPE, LQE)