| Presentation | 2016-06-29 [Invited Lecture] Preparation of orientation-controlled HfO2 –based films and their properties Hiroshi Funakub, Takao Shimizu, Kiriha Katayama, Takanori Mimura, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Ferroelectric epitaxial HfO2-based films were successfully grown on single crystal substrates. Distinguish method of ferroelectric phase with other phases was established by using XRD analysis. Ferroelectric HfO2-based films were grown on various kinds of substrates and their orientation control method was established. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | HfO2-based ferroelectric film / epitaxial films / orientation control |
| Paper # | SDM2016-33 |
| Date of Issue | 2016-06-22 (SDM) |
| Conference Information | |
| Committee | SDM |
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| Conference Date | 2016/6/29(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Campus Innovation Center Tokyo |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | Material Science and Process Technology for MOS Devices and Memories |
| Chair | Tatsuya Kunikiyo(Renesas) |
| Vice Chair | Takahiro Shinada(Tohoku Univ.) |
| Secretary | Takahiro Shinada(Tohoku Univ.) |
| Assistant | Hiroya Ikeda(Shizuoka Univ.) |
| Paper Information | |
| Registration To | Technical Committee on Silicon Device and Materials |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | [Invited Lecture] Preparation of orientation-controlled HfO2 –based films and their properties |
| Sub Title (in English) | |
| Keyword(1) | HfO2-based ferroelectric film |
| Keyword(2) | epitaxial films |
| Keyword(3) | orientation control |
| 1st Author's Name | Hiroshi Funakub |
| 1st Author's Affiliation | Tokyo Institute of Technology(Tokyo Tech.) |
| 2nd Author's Name | Takao Shimizu |
| 2nd Author's Affiliation | Tokyo Institute of Technology(Tokyo Tech.) |
| 3rd Author's Name | Kiriha Katayama |
| 3rd Author's Affiliation | Tokyo Institute of Technology(Tokyo Tech.) |
| 4th Author's Name | Takanori Mimura |
| 4th Author's Affiliation | Tokyo Institute of Technology(Tokyo Tech.) |
| Date | 2016-06-29 |
| Paper # | SDM2016-33 |
| Volume (vol) | vol.116 |
| Number (no) | SDM-118 |
| Page | pp.pp.5-8(SDM), |
| #Pages | 4 |
| Date of Issue | 2016-06-22 (SDM) |