Presentation 2016-05-20
Annealing of p-type wide-gap CuxZnyS thin films deposited by the photochemical deposition method
Bayingaerdi Tong, Masaya Ichimura,
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Abstract(in Japanese) (See Japanese page)
Abstract(in English) Zn-rich of CuxZnyS is a transparent p-type semiconductor. We prepared the CuxZnyS thin films by the photochemical deposition method, and investigated changes in properties due to annealing. The sample before annealing was amorphous, and its composition was Cu: Zn: S: O = 0.02: 0.34: 0.43: 0.21. The band gap was estimated to be about 3.5 eV from the optical transmission measurement. p-type conductivity was confirmed by the photoelectrochemical measurement. After annealing at 400ºC for 1 h, formation of the ZnS phase was observed by X-ray diffraction measurement. While the band gap did not change significantly, the conductivity type became close to intrinsic.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) Photochemical deposition (PCD) / CuxZnyS / Transparent semiconductor / Sulfur annealing
Paper # ED2016-22,CPM2016-10,SDM2016-27
Date of Issue 2016-05-12 (ED, CPM, SDM)

Conference Information
Committee CPM / ED / SDM
Conference Date 2016/5/19(2days)
Place (in Japanese) (See Japanese page)
Place (in English) Shizuoka University, Hamamatsu campus (Joint Research Lab.)
Topics (in Japanese) (See Japanese page)
Topics (in English) crystal growth、devices characterization , etc.
Chair Satoru Noge(Numazu National College of Tech.) / Koichi Maezawa(Univ. of Toyama) / Yuzou Oono(Univ. of Tsukuba)
Vice Chair Fumihiko Hirose(Yamagata Univ.) / Kunio Tsuda(Toshiba) / Tatsuya Kunikiyo(Renesas)
Secretary Fumihiko Hirose(NTT) / Kunio Tsuda(Nihon Univ.) / Tatsuya Kunikiyo(NEC)
Assistant Takashi Sakamoto(NTT) / Yuichi Nakamura(Toyohashi Univ. of Tech.) / Manabu Arai(New JRC) / Masataka Higashiwaki(NICT) / Tadashi Yamaguchi(Renesas)

Paper Information
Registration To Technical Committee on Component Parts and Materials / Technical Committee on Electron Device / Technical Committee on Silicon Device and Materials
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Annealing of p-type wide-gap CuxZnyS thin films deposited by the photochemical deposition method
Sub Title (in English)
Keyword(1) Photochemical deposition (PCD)
Keyword(2) CuxZnyS
Keyword(3) Transparent semiconductor
Keyword(4) Sulfur annealing
1st Author's Name Bayingaerdi Tong
1st Author's Affiliation Nagoya Institute of Technology(NITech)
2nd Author's Name Masaya Ichimura
2nd Author's Affiliation Nagoya Institute of Technology(NITech)
Date 2016-05-20
Paper # ED2016-22,CPM2016-10,SDM2016-27
Volume (vol) vol.116
Number (no) ED-48,CPM-49,SDM-50
Page pp.pp.43-46(ED), pp.43-46(CPM), pp.43-46(SDM),
#Pages 4
Date of Issue 2016-05-12 (ED, CPM, SDM)