| Presentation | 2016-05-19 Fabrication of CVD single-layer graphene diaphragm above a nano cavity by dry transfer technique Hayato Ishida, Makoto Ishida, Kazuaki Sawada, Kazuhiro Takahashi, |
|---|---|
| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Recent research on a technique for transferring a CVD graphene on any substrate has been actively conducted. In this work, for the application of the resonator device of graphene, we proposed a dry transfer technique with a simple and low temperature. As a result, we succeeded cavity fabrication of edge-clamped drum structure by transferring CVD single-layer graphene, the cavity size was achieved to be maximum diameter of 6 m and the minimum depth of 670 nm. We obtained Raman spectrum with 2D / G ratio of 1.88 and few D peak, which indicated that the edge-clamped drum structure of the high-quality single-layer graphene was achieved. Further, by observation of Raman spectrum, we experimentally demonstrated the usability of PMMA removal in liquid in the fabrication of edge-clamped drum structure using dry transfer with PMMA. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | NEMS / MEMS / graphene / dry transfer |
| Paper # | ED2016-13,CPM2016-1,SDM2016-18 |
| Date of Issue | 2016-05-12 (ED, CPM, SDM) |
| Conference Information | |
| Committee | CPM / ED / SDM |
|---|---|
| Conference Date | 2016/5/19(2days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Shizuoka University, Hamamatsu campus (Joint Research Lab.) |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | crystal growth、devices characterization , etc. |
| Chair | Satoru Noge(Numazu National College of Tech.) / Koichi Maezawa(Univ. of Toyama) / Yuzou Oono(Univ. of Tsukuba) |
| Vice Chair | Fumihiko Hirose(Yamagata Univ.) / Kunio Tsuda(Toshiba) / Tatsuya Kunikiyo(Renesas) |
| Secretary | Fumihiko Hirose(NTT) / Kunio Tsuda(Nihon Univ.) / Tatsuya Kunikiyo(NEC) |
| Assistant | Takashi Sakamoto(NTT) / Yuichi Nakamura(Toyohashi Univ. of Tech.) / Manabu Arai(New JRC) / Masataka Higashiwaki(NICT) / Tadashi Yamaguchi(Renesas) |
| Paper Information | |
| Registration To | Technical Committee on Component Parts and Materials / Technical Committee on Electron Device / Technical Committee on Silicon Device and Materials |
|---|---|
| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Fabrication of CVD single-layer graphene diaphragm above a nano cavity by dry transfer technique |
| Sub Title (in English) | |
| Keyword(1) | NEMS |
| Keyword(2) | MEMS |
| Keyword(3) | graphene |
| Keyword(4) | dry transfer |
| 1st Author's Name | Hayato Ishida |
| 1st Author's Affiliation | Toyohashi University of Technology(Toyohashi Tech.) |
| 2nd Author's Name | Makoto Ishida |
| 2nd Author's Affiliation | Toyohashi University of Technology(Toyohashi Tech.) |
| 3rd Author's Name | Kazuaki Sawada |
| 3rd Author's Affiliation | Toyohashi University of Technology/2Electronis-inspired Interdisciplinary Research Institute(Toyohashi Tech./EIIRIS) |
| 4th Author's Name | Kazuhiro Takahashi |
| 4th Author's Affiliation | Toyohashi University of Technology/2Electronis-inspired Interdisciplinary Research Institute(Toyohashi Tech./EIIRIS) |
| Date | 2016-05-19 |
| Paper # | ED2016-13,CPM2016-1,SDM2016-18 |
| Volume (vol) | vol.116 |
| Number (no) | ED-48,CPM-49,SDM-50 |
| Page | pp.pp.1-4(ED), pp.1-4(CPM), pp.1-4(SDM), |
| #Pages | 4 |
| Date of Issue | 2016-05-12 (ED, CPM, SDM) |