| Presentation | 2016-05-19 Fabrication of a thin plasmonic color sheet embedded with Al subwavelength gratings in parylene Hayato Kumagai, Hiroaki Honma, Makoto Ishida, Kazuaki Sawada, Kazuhiro Takahashi, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We fabricated a free-standing thin plasmonic color sheet embedded with Al subwavelength gratings for flexible optical transmission filters. A poly-para-xylylene (parylene-N) with a thickness of less than 1 µm was used as the thin sheet. Al subwavelength gratings were formed by using an electron-beam direct writing and a lift-off technique. As a result, we demonstrated transmission color depended on the period of the Al grating. In addition, the free-standing parylene film provided uniform transmission color in the filter area of 100 × 100µm2 due to the negligible residual stress by room temperature CVD. Transmission peak as a function of grating period was good agreement with simulation result by FDTD method using mixed model of parylene-N and air to the grating gap. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | MEMS / color filter / surface plasmon / flexible thin film |
| Paper # | ED2016-19,CPM2016-7,SDM2016-24 |
| Date of Issue | 2016-05-12 (ED, CPM, SDM) |
| Conference Information | |
| Committee | CPM / ED / SDM |
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| Conference Date | 2016/5/19(2days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Shizuoka University, Hamamatsu campus (Joint Research Lab.) |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | crystal growth、devices characterization , etc. |
| Chair | Satoru Noge(Numazu National College of Tech.) / Koichi Maezawa(Univ. of Toyama) / Yuzou Oono(Univ. of Tsukuba) |
| Vice Chair | Fumihiko Hirose(Yamagata Univ.) / Kunio Tsuda(Toshiba) / Tatsuya Kunikiyo(Renesas) |
| Secretary | Fumihiko Hirose(NTT) / Kunio Tsuda(Nihon Univ.) / Tatsuya Kunikiyo(NEC) |
| Assistant | Takashi Sakamoto(NTT) / Yuichi Nakamura(Toyohashi Univ. of Tech.) / Manabu Arai(New JRC) / Masataka Higashiwaki(NICT) / Tadashi Yamaguchi(Renesas) |
| Paper Information | |
| Registration To | Technical Committee on Component Parts and Materials / Technical Committee on Electron Device / Technical Committee on Silicon Device and Materials |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Fabrication of a thin plasmonic color sheet embedded with Al subwavelength gratings in parylene |
| Sub Title (in English) | |
| Keyword(1) | MEMS |
| Keyword(2) | color filter |
| Keyword(3) | surface plasmon |
| Keyword(4) | flexible thin film |
| 1st Author's Name | Hayato Kumagai |
| 1st Author's Affiliation | Toyohashi University of Technology(Toyohashi Univ.) |
| 2nd Author's Name | Hiroaki Honma |
| 2nd Author's Affiliation | Toyohashi University of Technology/Japan Society for the Promotion of Science(Toyohashi Univ./JSPS) |
| 3rd Author's Name | Makoto Ishida |
| 3rd Author's Affiliation | Toyohashi University of Technology/Electronics Inspired-Interdisciplinary Research Institute(Toyohashi Univ./EIIRIS) |
| 4th Author's Name | Kazuaki Sawada |
| 4th Author's Affiliation | Toyohashi University of Technology/Electronics Inspired-Interdisciplinary Research Institute(Toyohashi Univ./EIIRIS) |
| 5th Author's Name | Kazuhiro Takahashi |
| 5th Author's Affiliation | Toyohashi University of Technology(Toyohashi Univ.) |
| Date | 2016-05-19 |
| Paper # | ED2016-19,CPM2016-7,SDM2016-24 |
| Volume (vol) | vol.116 |
| Number (no) | ED-48,CPM-49,SDM-50 |
| Page | pp.pp.29-34(ED), pp.29-34(CPM), pp.29-34(SDM), |
| #Pages | 6 |
| Date of Issue | 2016-05-12 (ED, CPM, SDM) |