| Presentation | 2016-04-09 Effect of Low Temperature Annealing of Sputtered SiO2 for Gate Insulator in Poly-Si TFTs Hikaru Tamashiro, Kimihiko Imura, Tatsuya Okada, Takashi Noguchi, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | |
| Paper # | SDM2016-16,OME2016-16 |
| Date of Issue | 2016-04-01 (SDM, OME) |
| Conference Information | |
| Committee | SDM / OME |
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| Conference Date | 2016/4/8(2days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Okinawa Prefectural Museum & Art Museum |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | Thin film devices, etc |
| Chair | Yuzou Oono(Univ. of Tsukuba) / Naoki Matsuda(AIST) |
| Vice Chair | Tatsuya Kunikiyo(Renesas) / Tatsuo Mori(Aichi Inst. of Tech.) |
| Secretary | Tatsuya Kunikiyo(Tohoku Univ.) / Tatsuo Mori(NTT) |
| Assistant | Tadashi Yamaguchi(Renesas) / Hirotake Kajii(Osaka Univ.) / Dai Taguchi(Tokyo Inst. of Tech.) |
| Paper Information | |
| Registration To | Technical Committee on Silicon Device and Materials / Technical Committee on Organic Molecular Electronics |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Effect of Low Temperature Annealing of Sputtered SiO2 for Gate Insulator in Poly-Si TFTs |
| Sub Title (in English) | |
| Keyword(1) | |
| 1st Author's Name | Hikaru Tamashiro |
| 1st Author's Affiliation | University of the Ryukyus(Univ. Ryukyu) |
| 2nd Author's Name | Kimihiko Imura |
| 2nd Author's Affiliation | University of the Ryukyus(Univ. Ryukyu) |
| 3rd Author's Name | Tatsuya Okada |
| 3rd Author's Affiliation | University of the Ryukyus(Univ. Ryukyu) |
| 4th Author's Name | Takashi Noguchi |
| 4th Author's Affiliation | University of the Ryukyus(Univ. Ryukyu) |
| Date | 2016-04-09 |
| Paper # | SDM2016-16,OME2016-16 |
| Volume (vol) | vol.116 |
| Number (no) | SDM-1,OME-2 |
| Page | pp.pp.67-69(SDM), pp.67-69(OME), |
| #Pages | 3 |
| Date of Issue | 2016-04-01 (SDM, OME) |