Presentation | 2016-04-08 Multi-shots ELA of sputtered Si film and TFT with metal source-drain structure Taisei Harada, Futa Gakiya, Takuya Ashitomi, Tatsuya Okada, Takashi Noguchi, Kanji Noda, Akira Suwa, Hiroshi Ikenoue, Tetsuo Okuyama, |
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PDF Download Page | PDF download Page Link |
Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | |
Paper # | SDM2016-10,OME2016-10 |
Date of Issue | 2016-04-01 (SDM, OME) |
Conference Information | |
Committee | SDM / OME |
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Conference Date | 2016/4/8(2days) |
Place (in Japanese) | (See Japanese page) |
Place (in English) | Okinawa Prefectural Museum & Art Museum |
Topics (in Japanese) | (See Japanese page) |
Topics (in English) | Thin film devices, etc |
Chair | Yuzou Oono(Univ. of Tsukuba) / Naoki Matsuda(AIST) |
Vice Chair | Tatsuya Kunikiyo(Renesas) / Tatsuo Mori(Aichi Inst. of Tech.) |
Secretary | Tatsuya Kunikiyo(Tohoku Univ.) / Tatsuo Mori(NTT) |
Assistant | Tadashi Yamaguchi(Renesas) / Hirotake Kajii(Osaka Univ.) / Dai Taguchi(Tokyo Inst. of Tech.) |
Paper Information | |
Registration To | Technical Committee on Silicon Device and Materials / Technical Committee on Organic Molecular Electronics |
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Language | JPN |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | Multi-shots ELA of sputtered Si film and TFT with metal source-drain structure |
Sub Title (in English) | |
Keyword(1) | |
1st Author's Name | Taisei Harada |
1st Author's Affiliation | University of the Ryukyus(Univ. of the Ryukyus) |
2nd Author's Name | Futa Gakiya |
2nd Author's Affiliation | University of the Ryukyus(Univ. of the Ryukyus) |
3rd Author's Name | Takuya Ashitomi |
3rd Author's Affiliation | University of the Ryukyus(Univ. of the Ryukyus) |
4th Author's Name | Tatsuya Okada |
4th Author's Affiliation | University of the Ryukyus(Univ. of the Ryukyus) |
5th Author's Name | Takashi Noguchi |
5th Author's Affiliation | University of the Ryukyus(Univ. of the Ryukyus) |
6th Author's Name | Kanji Noda |
6th Author's Affiliation | GiGAPHOTON Incorporated(GiGAPHOTON Inc.) |
7th Author's Name | Akira Suwa |
7th Author's Affiliation | GiGAPHOTON Incorporated(GiGAPHOTON Inc.) |
8th Author's Name | Hiroshi Ikenoue |
8th Author's Affiliation | Kyusyu University(Kyusyu Univ.) |
9th Author's Name | Tetsuo Okuyama |
9th Author's Affiliation | TOYOBO Company, Limited(TOYOBO Company, Limited) |
Date | 2016-04-08 |
Paper # | SDM2016-10,OME2016-10 |
Volume (vol) | vol.116 |
Number (no) | SDM-1,OME-2 |
Page | pp.pp.39-41(SDM), pp.39-41(OME), |
#Pages | 3 |
Date of Issue | 2016-04-01 (SDM, OME) |