Presentation 2016-04-08
Multi-shots ELA of sputtered Si film and TFT with metal source-drain structure
Taisei Harada, Futa Gakiya, Takuya Ashitomi, Tatsuya Okada, Takashi Noguchi, Kanji Noda, Akira Suwa, Hiroshi Ikenoue, Tetsuo Okuyama,
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Abstract(in Japanese) (See Japanese page)
Abstract(in English)
Keyword(in Japanese) (See Japanese page)
Keyword(in English)
Paper # SDM2016-10,OME2016-10
Date of Issue 2016-04-01 (SDM, OME)

Conference Information
Committee SDM / OME
Conference Date 2016/4/8(2days)
Place (in Japanese) (See Japanese page)
Place (in English) Okinawa Prefectural Museum & Art Museum
Topics (in Japanese) (See Japanese page)
Topics (in English) Thin film devices, etc
Chair Yuzou Oono(Univ. of Tsukuba) / Naoki Matsuda(AIST)
Vice Chair Tatsuya Kunikiyo(Renesas) / Tatsuo Mori(Aichi Inst. of Tech.)
Secretary Tatsuya Kunikiyo(Tohoku Univ.) / Tatsuo Mori(NTT)
Assistant Tadashi Yamaguchi(Renesas) / Hirotake Kajii(Osaka Univ.) / Dai Taguchi(Tokyo Inst. of Tech.)

Paper Information
Registration To Technical Committee on Silicon Device and Materials / Technical Committee on Organic Molecular Electronics
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Multi-shots ELA of sputtered Si film and TFT with metal source-drain structure
Sub Title (in English)
Keyword(1)
1st Author's Name Taisei Harada
1st Author's Affiliation University of the Ryukyus(Univ. of the Ryukyus)
2nd Author's Name Futa Gakiya
2nd Author's Affiliation University of the Ryukyus(Univ. of the Ryukyus)
3rd Author's Name Takuya Ashitomi
3rd Author's Affiliation University of the Ryukyus(Univ. of the Ryukyus)
4th Author's Name Tatsuya Okada
4th Author's Affiliation University of the Ryukyus(Univ. of the Ryukyus)
5th Author's Name Takashi Noguchi
5th Author's Affiliation University of the Ryukyus(Univ. of the Ryukyus)
6th Author's Name Kanji Noda
6th Author's Affiliation GiGAPHOTON Incorporated(GiGAPHOTON Inc.)
7th Author's Name Akira Suwa
7th Author's Affiliation GiGAPHOTON Incorporated(GiGAPHOTON Inc.)
8th Author's Name Hiroshi Ikenoue
8th Author's Affiliation Kyusyu University(Kyusyu Univ.)
9th Author's Name Tetsuo Okuyama
9th Author's Affiliation TOYOBO Company, Limited(TOYOBO Company, Limited)
Date 2016-04-08
Paper # SDM2016-10,OME2016-10
Volume (vol) vol.116
Number (no) SDM-1,OME-2
Page pp.pp.39-41(SDM), pp.39-41(OME),
#Pages 3
Date of Issue 2016-04-01 (SDM, OME)