| Presentation | 2016-04-08 Non-thermal energy utilized low temperature solid phase crystallization of amorphous Ge on SiO2 substrate Kinta Kusano, Kazuki Kudo, Kodai Tomouchi, Taisei Sakaguchi, Kenta Moto, Shinichi Motoyama, Yutaka Kusuda, Masahiro Furuta, Nobuyuki Naka, Tomoko Numata, Kenichiro Takakura, Isao Tsunoda, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We have investigated the low-temperature SPC of amorphous Ge on insulating substrate. High temperature and long time annealing are necessary to obtain the crystalline Ge on insulating substrate by conventional SPC method. In order to enhance the crystal nucleation, the initial amorphicity modulation induced by electron irradiation was carried out. The incubation time for crystal nucleation was decreased to 1/50 of that without electron irradiation. Furthermore, the compressive stress stimulated MIC of amorphous Ge on insulating substrate has examined. As a result, the solid phase crystallization of amorphous Ge was significantly enhanced (~ 1000 times). In addition, the crystallization temperature can be decreased to 120 oC. In this way, low temperature crystallization below the softening temperature of low cost plastic substrate (150 oC) becomes possible. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Germanium / Solid phase crystallization / Metal induced crystallization / Electron beam irradiation / Compressive stress stimulation |
| Paper # | SDM2016-8,OME2016-8 |
| Date of Issue | 2016-04-01 (SDM, OME) |
| Conference Information | |
| Committee | SDM / OME |
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| Conference Date | 2016/4/8(2days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Okinawa Prefectural Museum & Art Museum |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | Thin film devices, etc |
| Chair | Yuzou Oono(Univ. of Tsukuba) / Naoki Matsuda(AIST) |
| Vice Chair | Tatsuya Kunikiyo(Renesas) / Tatsuo Mori(Aichi Inst. of Tech.) |
| Secretary | Tatsuya Kunikiyo(Tohoku Univ.) / Tatsuo Mori(NTT) |
| Assistant | Tadashi Yamaguchi(Renesas) / Hirotake Kajii(Osaka Univ.) / Dai Taguchi(Tokyo Inst. of Tech.) |
| Paper Information | |
| Registration To | Technical Committee on Silicon Device and Materials / Technical Committee on Organic Molecular Electronics |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Non-thermal energy utilized low temperature solid phase crystallization of amorphous Ge on SiO2 substrate |
| Sub Title (in English) | |
| Keyword(1) | Germanium |
| Keyword(2) | Solid phase crystallization |
| Keyword(3) | Metal induced crystallization |
| Keyword(4) | Electron beam irradiation |
| Keyword(5) | Compressive stress stimulation |
| 1st Author's Name | Kinta Kusano |
| 1st Author's Affiliation | National Institute of Technology, Kumamoto College(NIT, Kumamoto) |
| 2nd Author's Name | Kazuki Kudo |
| 2nd Author's Affiliation | National Institute of Technology, Kumamoto College(NIT, Kumamoto) |
| 3rd Author's Name | Kodai Tomouchi |
| 3rd Author's Affiliation | National Institute of Technology, Kumamoto College(NIT, Kumamoto) |
| 4th Author's Name | Taisei Sakaguchi |
| 4th Author's Affiliation | National Institute of Technology, Kumamoto College(NIT, Kumamoto) |
| 5th Author's Name | Kenta Moto |
| 5th Author's Affiliation | National Institute of Technology, Kumamoto College(NIT, Kumamoto) |
| 6th Author's Name | Shinichi Motoyama |
| 6th Author's Affiliation | SAMCO(SAMCO) |
| 7th Author's Name | Yutaka Kusuda |
| 7th Author's Affiliation | SAMCO(SAMCO) |
| 8th Author's Name | Masahiro Furuta |
| 8th Author's Affiliation | SAMCO(SAMCO) |
| 9th Author's Name | Nobuyuki Naka |
| 9th Author's Affiliation | HORIBA(HORIBA) |
| 10th Author's Name | Tomoko Numata |
| 10th Author's Affiliation | HORIBA(HORIBA) |
| 11th Author's Name | Kenichiro Takakura |
| 11th Author's Affiliation | National Institute of Technology, Kumamoto College(NIT, Kumamoto) |
| 12th Author's Name | Isao Tsunoda |
| 12th Author's Affiliation | National Institute of Technology, Kumamoto College(NIT, Kumamoto) |
| Date | 2016-04-08 |
| Paper # | SDM2016-8,OME2016-8 |
| Volume (vol) | vol.116 |
| Number (no) | SDM-1,OME-2 |
| Page | pp.pp.31-34(SDM), pp.31-34(OME), |
| #Pages | 4 |
| Date of Issue | 2016-04-01 (SDM, OME) |