Presentation 2016-03-04
Nanoscale domain inversion in ferroelectric Y:HfO2 thin film
Zhou Chen, Yoshiomi Hiranaga, Takao Shimizu, Kiriha Katayama, Takanori Mimura, Hiroshi Funakubo, Yasuo Cho,
PDF Download Page PDF download Page Link
Abstract(in Japanese) (See Japanese page)
Abstract(in English) In recent years, ferroelectricity in hafnium oxide thin film such as Y:HfO2 thin film has been demonstrated. But until now, there is few researches in which the polarization inversion of ferroelectric thin film at nanoscale has been observed directly. In this research, we used scanning nonlinear dielectric microscopy (SNDM) to observe an epitaxial orientation Y:HfO2 thin film with a thickness of 11nm and performed a domain inversion experiment on it. So that we confirmed that ferroelectricity of Y:HfO2 thin film can be observed by SDNM. And then we applied pulse voltage to the thin film surface by using a very fine probe tip. As a result, dots with diameter of about 26nm were formed. This shows the capability of Y:HfO2 to be used as media of ferroelectric data storage.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) Hafnium Oxide Thin Film / Scanning Nonlinear Dielectric Microscopy / Ferroelectric Data Storage
Paper # MR2015-34
Date of Issue 2016-02-26 (MR)

Conference Information
Committee MR / ITE-MMS / IEE-MAG
Conference Date 2016/3/4(1days)
Place (in Japanese) (See Japanese page)
Place (in English) Nagoya Univ.
Topics (in Japanese) (See Japanese page)
Topics (in English) Optical recording, etc.
Chair Masukazu Igarashi(*) / Eiichi Miyashita(NHK) / Masahiro Yamaguchi(Tohoku Univ.)
Vice Chair
Secretary (Syowa Denko) / (Toshiba) / (Hitachi Maxell)
Assistant Fumiko Akagi(Kogakuin Univ.) / Takayuki Shima(AIST) / / Keiju Yamada(Toshiba Co.)

Paper Information
Registration To Technical Committee on Magnetic Recording / Technical Group on Multi-media Storage / Technical Meeting on Magnetics
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Nanoscale domain inversion in ferroelectric Y:HfO2 thin film
Sub Title (in English)
Keyword(1) Hafnium Oxide Thin Film
Keyword(2) Scanning Nonlinear Dielectric Microscopy
Keyword(3) Ferroelectric Data Storage
1st Author's Name Zhou Chen
1st Author's Affiliation Tohoku University(Tohoku Univ.)
2nd Author's Name Yoshiomi Hiranaga
2nd Author's Affiliation Tohoku University(Tohoku Univ.)
3rd Author's Name Takao Shimizu
3rd Author's Affiliation Tokyo Institute of Technology(Tokyo Tech)
4th Author's Name Kiriha Katayama
4th Author's Affiliation Tokyo Institute of Technology(Tokyo Tech)
5th Author's Name Takanori Mimura
5th Author's Affiliation Tokyo Institute of Technology(Tokyo Tech)
6th Author's Name Hiroshi Funakubo
6th Author's Affiliation Tokyo Institute of Technology(Tokyo Tech)
7th Author's Name Yasuo Cho
7th Author's Affiliation Tohoku University(Tohoku Univ.)
Date 2016-03-04
Paper # MR2015-34
Volume (vol) vol.115
Number (no) MR-490
Page pp.pp.29-32(MR),
#Pages 4
Date of Issue 2016-02-26 (MR)